X-Lase CoreScriber, picosecond fiber laser tool for high-precision scribing and cutting of transparent materials

被引:4
|
作者
Kivisto, S. [1 ]
Amberla, T. [1 ]
Konnunaho, T. [1 ]
Kangastupa, J. [1 ]
Sillanpaa, J. [1 ]
机构
[1] Corelase Oy, FI-33721 Tampere, Finland
来源
LASERS IN MANUFACTURING (LIM 2013) | 2013年 / 41卷
关键词
Laser micro-processing; sapphire scribing; glass scribing; fiber lasers; pulsed lasers;
D O I
10.1016/j.phpro.2013.03.120
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have developed various industrial transparent material scribing processes and a laser tool, picosecond MHz-range all-fiber laser X-Lase CoreScriber. The remarkably high peak power, exceptionally good beam quality, and integrability of the X-Lase CoreScriber combined with high achievable material processing speeds provide tempting solutions for high-precision glass processing. Here presented sapphire and Gorilla glass dicing processes are based on transparent material internal modification with short and intense high repetition rate ps-laser pulses. Increased processing speeds and cutting qualities in comparison to other conventional processing methods are presented. (C) 2013 The Authors. Published by Elsevier B. V. Selection and/or peer-review under responsibility of the German Scientific Laser Society (WLT e.V.)
引用
收藏
页码:582 / 584
页数:3
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