OFC error compensation technology for the absolute grating measuring system

被引：0

作者：

Zhang, C. M. ^{[1
]}

Huang, Z. L. ^{[2
]}

Zhang, S. T. ^{[2
]}

机构：

[1] Jilin Univ, Zhuhai Coll, Zhuhai, Guangdong, Peoples R China

[2] Easson, Zhuhai, Guangdong, Peoples R China

来源：

DESIGN, MANUFACTURING AND MECHATRONICS (ICDMM 2015) | 2016年

关键词：

Grating ruler absolute code; incremental code; error compensation;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In the grating displacement measurement system, there are many factors which affect the accuracy of measurement. Based on a high speed and high precision displacement measurement method with absolute and incremental double grating scales, which is designed by Easson, and OFC (on field compensation) error compensation technology is offered. In addition, the experiment is done to test the effectiveness of this technology, and the result shows that it can improve effectively the accuracy of measurement and compensate the comprehensive error.

引用

页码：1202 / 1209

页数：8