Chemical vapor deposition synthesis of graphene films

被引:29
作者
Qing, Fangzhu [1 ,2 ]
Hou, Yuting [1 ,2 ]
Stehle, Richard [3 ]
Li, Xuesong [1 ,2 ]
机构
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Sichuan, Peoples R China
[2] Univ Elect Sci & Technol China, Sch Elect Sci & Engn, Chengdu 610054, Sichuan, Peoples R China
[3] Sichuan Univ, Pittsburgh Inst, Mech Engn Dept, Jiangan Campus, Chengdu 610207, Sichuan, Peoples R China
基金
中国国家自然科学基金;
关键词
SINGLE-CRYSTAL GRAPHENE; HIGH-QUALITY; GROWTH; OXYGEN; LAYERS;
D O I
10.1063/1.5078551
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Chemical vapor deposition synthesis of graphene films has developed over the past decade and has been used in both academia and industry. This perspective discusses the major areas of focus for this topic, including the recent achievements and the challenges to be overcome. (C) 2019 Author(s).
引用
收藏
页数:5
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