Normally-closed electrostatic micro valve with pressure balance mechanism for portable fuel cell application

被引：0

作者：

Yoshida, K ^{[1
]}

Hagihara, Y

Tanaka, S

Esashi, M

机构：

[1] Matsushita Elect Ind Co Ltd, 1048 Kadoma Aza, Kadoma, Osaka 5718686, Japan

[2] Tohoku Univ, Aoba Ku, Sendai, Miyagi 9808579, Japan

来源：

MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2006年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes an electrostatic micro valve which controls fuel in a portable direct methanol fuel cell (DMFC) system under development. A novel pressure balance mechanism is adopted to achieve both normally-closed operation against pressurized fuel and low voltage operation. The fabricated micro valve was tested using air as a working fluid in terms of leak pressure and driving voltage. The micro valve kept close state at input pressure from 0 kPa to 20 kPa. The driving voltage to fully open the micro valve was from 30 V to 60 V. These results well agree with the theoretical estimation.

引用

页码：722 / 725

页数：4