Flexible piezotronic strain sensor

被引:756
作者
Zhou, Jun [1 ,2 ,3 ]
Gu, Yudong [1 ,4 ]
Fei, Peng [1 ,4 ]
Mai, Wenjie [1 ]
Gao, Yifan [1 ]
Yang, Rusen [1 ]
Bao, Gang [2 ,3 ]
Wang, Zhong Lin [1 ]
机构
[1] Georgia Inst Technol, Sch Mat Sci & Engn, Atlanta, GA 30332 USA
[2] Georgia Inst Technol, Dept Biomed Engn, Atlanta, GA 30332 USA
[3] Emory Univ, Atlanta, GA 30332 USA
[4] Peking Univ, Coll Engn, Dept Adv Mat & Nanotechnol, Beijing 100084, Peoples R China
关键词
D O I
10.1021/nl802367t
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Strain sensors based on individual ZnO piezoelectric fine-wires (PFWs; nanowires, microwires) have been fabricated by a simple, reliable, and cost-effective technique. The electromechanical sensor device consists of a single electrically connected PFW that is placed on the outer surface of a flexible polystyrene (PS) substrate and bonded at its two ends. The entire device is fully packaged by a polydimethylsiloxane (PDMS) thin layer. The PFW has Schottky contacts at its two ends but with distinctly different barrier heights. The I-V characteristic is highly sensitive to strain mainly due to the change in Schottky barrier height (SBH), which scales linear with strain. The change in SBH is suggested owing to the strain induced band structure change and piezoelectric effect. The experimental data can be well-described by the thermionic emission-diffusion model. A gauge factor of as high as 1250 has been demonstrated, which is 25% higher than the best gauge factor demonstrated for carbon nanotubes. The strain sensor developed here has applications in strain and stress measurements in cell biology, biomedical sciences, MEMS devices, structure monitoring, and more.
引用
收藏
页码:3035 / 3040
页数:6
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