Measurement of nanohardness and nanoelasticity of thin gold films with scanning force microscope

被引:57
作者
Kracke, B [1 ]
Damaschke, B [1 ]
机构
[1] Univ Gottingen, Inst Phys 1, D-37073 Gottingen, Germany
关键词
D O I
10.1063/1.126976
中图分类号
O59 [应用物理学];
学科分类号
摘要
With a scanning force microscope operating in ultrahigh vacuum, we measured local mechanical properties of single crystalline gold islands. The elastic moduli of the gold islands and the substrates sapphire, mica, and quartz were evaluated from force-distance curves. The value of Young's elastic modulus in [111] direction of the gold grains is (50 +/- 16) GPa and was found to be significantly smaller than the bulk modulus of gold. With an indentation technique, the nanohardness of gold islands was investigated. The nanohardness is smaller than the bulk value and depends on the indentation area. This can be interpreted as nanohardening by dislocation interaction in very pure single crystals. (C) 2000 American Institute of Physics. [S0003-6951(00)05429-2].
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页码:361 / 363
页数:3
相关论文
共 20 条
[1]   ATOMIC FORCE MICROSCOPE [J].
BINNIG, G ;
QUATE, CF ;
GERBER, C .
PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933
[2]   CALCULATED ELASTIC-CONSTANTS FOR STRESS PROBLEMS ASSOCIATED WITH SEMICONDUCTOR DEVICES [J].
BRANTLEY, WA .
JOURNAL OF APPLIED PHYSICS, 1973, 44 (01) :534-535
[3]   MEASURING THE NANOMECHANICAL PROPERTIES AND SURFACE FORCES OF MATERIALS USING AN ATOMIC FORCE MICROSCOPE [J].
BURNHAM, NA ;
COLTON, RJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (04) :2906-2913
[4]  
Chopra K. L., 1969, Thin Films Phenomena
[5]   SCANNING PROBE MICROSCOPY OF THIN-FILMS [J].
HUES, SM ;
COLTON, RJ ;
MEYER, E ;
GUNTHERODT, HJ .
MRS BULLETIN, 1993, 18 (01) :41-49
[6]  
KOHLRAUSCH F, 1968, PRAKTISCHE PHYSIK, V3
[7]   Ultrahigh vacuum scanning force microscope with fiber optic deflection sensor [J].
Kracke, B ;
Damaschke, B .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (08) :2957-2959
[8]  
KRACKE B, 1992, THESIS U GOTTINGEN
[9]   ATOMISTIC MECHANISMS AND DYNAMICS OF ADHESION, NANOINDENTATION, AND FRACTURE [J].
LANDMAN, U ;
LUEDTKE, WD ;
BURNHAM, NA ;
COLTON, RJ .
SCIENCE, 1990, 248 (4954) :454-461
[10]  
LAX E, 1967, TASCHENBUCH CHEM PHY