Er0.4Bi1.6O3 thin films in situ crystallized at low temperature onto the Gd0.1Ce0.9O1.95 bulk electrolytes via Facing Target Sputtering

被引:4
作者
Jeung, Ji-Na [1 ]
Eom, Ji-Ho [2 ]
Park, Byeong-Ju [2 ]
Kim, Sun-Dong [3 ]
Yoon, Soon-Gil [1 ,2 ]
机构
[1] Chungnam Natl Univ, Adv Circuit Substrate Engn, Daeduck 34134, Daejeon, South Korea
[2] Chungnam Natl Univ, Dept Mat Sci & Engn, Daeduck 34134, Daejeon, South Korea
[3] Korea Inst Energy Res, Energy Mat Ctr, 152 Gajeong Ro, Daejeon 34129, South Korea
基金
新加坡国家研究基金会;
关键词
On-axis sputtering; Facing-Target Sputtering; Low-temperature crystallization; High-step coverage; Ionic conductivity; OXIDE FUEL-CELLS; BILAYER ELECTROLYTES; PERFORMANCE; FABRICATION; ANODE; SOFCS; CERIA;
D O I
10.1016/j.cap.2017.02.010
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
For large-area Er0.4Bi1.6O3 (ESB) films on the Gd0.1Ce0.9O1.95 (GDC) pellets, the 300 nm-thick ESB films were deposited on the 0.2 cm-thick GDC pellets at different temperatures via on-axis sputtering and Facing-Target Sputtering (FTS) for enhancement of the ionic conductivity of the GDC. The ESB films deposited on the GDC pellets via FTS show a good step-coverage and a well-crystallization at a low temperature of 300 degrees C. The ESB/GDC bilayers with lower activation energy than GDC single layer showed an enhanced ionic conductivity in intermediate-temperature range from 500 to 700 degrees C. FTS is an attractive method for the ESB film deposition for low-temperature crystallization on the high-roughened GDC pellets. (C) 2017 Elsevier B.V. All rights reserved.
引用
收藏
页码:751 / 755
页数:5
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