The Study of GaN PN-Junction Grown on Si Substrate by MBE with Ni/Ag as Ohmic Contact
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作者:
Yusoff, Mohd Zaki Mohd
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Univ Teknol MARA Pulau Pinang, Dept Appl Sci, Permatang Pauh 13500, Pulau Pinang, Malaysia
Univ Teknol MARA Pulau Pinang, Fac Elect Engn, George Town, MalaysiaUniv Teknol MARA Pulau Pinang, Dept Appl Sci, Permatang Pauh 13500, Pulau Pinang, Malaysia
Yusoff, Mohd Zaki Mohd
[1
,3
]
Hassan, Zainuriah
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机构:
Univ Sains Malaysia, Sch Phys, Penang, MalaysiaUniv Teknol MARA Pulau Pinang, Dept Appl Sci, Permatang Pauh 13500, Pulau Pinang, Malaysia
Hassan, Zainuriah
[2
]
Woei, Chin Che
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机构:
Univ Sains Malaysia, Sch Phys, Penang, MalaysiaUniv Teknol MARA Pulau Pinang, Dept Appl Sci, Permatang Pauh 13500, Pulau Pinang, Malaysia
Woei, Chin Che
[2
]
Ahmad, Anas
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Univ Sains Malaysia, Sch Phys, Penang, MalaysiaUniv Teknol MARA Pulau Pinang, Dept Appl Sci, Permatang Pauh 13500, Pulau Pinang, Malaysia
Ahmad, Anas
[2
]
Yusof, Yushamdan
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Univ Sains Malaysia, Sch Phys, Penang, MalaysiaUniv Teknol MARA Pulau Pinang, Dept Appl Sci, Permatang Pauh 13500, Pulau Pinang, Malaysia
Yusof, Yushamdan
[2
]
Abd Rahim, Alhan Farhanah
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机构:
Univ Teknol MARA Pulau Pinang, Fac Elect Engn, George Town, MalaysiaUniv Teknol MARA Pulau Pinang, Dept Appl Sci, Permatang Pauh 13500, Pulau Pinang, Malaysia
Abd Rahim, Alhan Farhanah
[3
]
机构:
[1] Univ Teknol MARA Pulau Pinang, Dept Appl Sci, Permatang Pauh 13500, Pulau Pinang, Malaysia
[2] Univ Sains Malaysia, Sch Phys, Penang, Malaysia
[3] Univ Teknol MARA Pulau Pinang, Fac Elect Engn, George Town, Malaysia
来源:
IEEE SYMPOSIUM ON BUSINESS, ENGINEERING AND INDUSTRIAL APPLICATIONS (ISBEIA 2012)
|
2012年
关键词:
GaN;
PN;
III-Nitrides;
MBE;
LOCAL VIBRATIONAL-MODES;
MOLECULAR-BEAM EPITAXY;
D O I:
暂无
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
The gallium nitride (GaN) pn-junctions was grown on silicon (111) substrate by plasma assisted molecular beam epitaxy (PA-MBE) on top of a AlN buffer in order to reduce the strain of the alloy. For GaN pn-junction layers, silicon and magnesium were used as n and p dopants, respectively. The SEM images show a high quality hetero-interface without cracking by optimizing the growth conditions. The full width at half-maximum (FWHM) of the GaN pn-junctions deposited on silicon as determined by X-ray diffraction (XRD) symmetric rocking curve (RC) omega/2 theta scans of (0002) plane at room temperature is 0.34 degrees. Raman results show the maximum intensity at 523.63 cm(-1) which is attributed to crystalline silicon. All the allowed Raman optical phonon modes of GaN, i.e. the E-2 (low), E-1 (high) and A(1) (LO) are clearly presented, which are located at 147.76 cm(-1), 571.65 cm(-1) and 737.9 cm(-1), respectively. The presence of E-1 (high) has led to the evidence of hexagonal-phase character for this GaN pn-junction layer. The non-existence of yellow band emission in PL result confirmed that the thin film is of good optical quality. The GaN pn-junction diode shows a rectifying behavior of current under forward bias.