A Design Procedure for High-Performance, Rib-Waveguide-Based Multimode Interference Couplers in Silicon-on-Insulator

被引：49

作者：

Halir, Robert ^{[1
]}

Molina-Fernandez, I. ^{[1
]}

Ortega-Monux, A. ^{[1
]}

Wanguemert-Perez, J. G. ^{[1
]}

Xu, Dan-Xia ^{[2
]}

Cheben, Pavel ^{[2
]}

Janz, Siegfried ^{[2
]}

机构：

[1] Univ Malaga, ETSI Telecommun, Dept Ingn Comun, Malaga 29010, Spain

[2] Natl Res Council Canada, Inst Microstruct Sci, Ottawa, ON K1A 0RA, Canada

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 2008年 / 26卷 / 13-16期

关键词：

Design; multimode interference (MMI); rib waveguide; silicon-on-insulator;

D O I：

10.1109/JLT.2007.914511

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Single mode silicon-on-insulator rib waveguides offer a weak lateral confinement, which makes it difficult to design high-performance multimode interference couplers (MMIs) based on these waveguides. Here, a complete design procedure for single etch step MMIs with tapered rib access waveguides is presented, which yields low excess loss (0.1 dB) and good imbalance (0.02 dB). Furthermore, polarization dependence is low, and high fabrication tolerances are achieved, especially with respect to etch depth.

引用

页码：2928 / 2936

页数：9

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