Alumina and silicon oxide/nitride sidewall passivation for P- and N-type sensors

被引：25

作者：

Christophersen, M. ^{[1
]}

Fadeyev, V. ^{[2
]}

Phlips, B. F. ^{[1
]}

Sadrozinski, H. F. -W. ^{[2
]}

Parker, C. ^{[2
]}

Ely, S. ^{[2
]}

Wright, J. G. ^{[2
]}

机构：

[1] USN, Res Lab, Space Sci Div, Washington, DC 20375 USA

[2] Univ Calif Santa Cruz, Santa Cruz Inst Particle Phys, Santa Cruz, CA 95064 USA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2013年 / 699卷

关键词：

LHC; ATLAS; Radiation hardness; Slim edges;

D O I：

10.1016/j.nima.2012.04.077

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Silicon detectors normally have an inactive region along the perimeter of the sensor. In this paper we describe a "scribe, cleave, and passivate" (SCP) technique for the fabrication of slim edges in a post processing with finished detectors. The scribing was done by laser-scribing and etching. After scribing and cleaving steps, the sidewalls are passivated with a dielectric. We present results for n- and p-type sensors with different sidewall passivations. The leakage current depends strongly on the type of sidewall passivation. An alumina passivation leads to very low leakage currents for p-type sensors because of a negative interface charge. For n-type sensors, a hydrogenated silicon nitride shows the lowest leakage currents. Furthermore, we applied the technique to large area n-type single-sided strip detectors (cleaving length up to 3.5 cm). Published by Elsevier B.V.

引用

页码：14 / 17

页数：4

共 10 条

[1] The ATLAS Experiment at the CERN Large Hadron Collider [J].

Aad, G. ;

Abat, E. ;

Abdallah, J. ;

Abdelalim, A. A. ;

Abdesselam, A. ;

Abdinov, O. ;

Abi, B. A. ;

Abolins, M. ;

Abramowicz, H. ;

Acerbi, E. ;

Acharya, B. S. ;

Achenbach, R. ;

Ackers, M. ;

Adams, D. L. ;

Adamyan, F. ;

Addy, T. N. ;

Aderholz, M. ;

Adorisio, C. ;

Adragna, P. ;

Aharrouche, M. ;

Ahlen, S. P. ;

Ahles, F. ;

Ahmad, A. ;

Ahmed, H. ;

Aielli, G. ;

Akesson, P. F. ;

Akesson, T. P. A. ;

Alam, S. M. ;

Albert, J. ;

Albrand, S. ;

Aleksa, M. ;

Aleksandrov, I. N. ;

Aleppo, M. ;

Alessandria, F. ;

Alexa, C. ;

Alexander, G. ;

Alexopoulos, T. ;

Alimonti, G. ;

Aliyev, M. ;

Allport, P. P. ;

Allwood-Spiers, S. E. ;

Aloisio, A. ;

Alonso, J. ;

Alves, R. ;

Alviggi, M. G. ;

Amako, K. ;

Amaral, P. ;

Amaral, S. P. ;

Ambrosini, G. ;

Ambrosio, G. .

JOURNAL OF INSTRUMENTATION, 2008, 3

[2] Response to minimum ionising particles of p-type substrate silicon microstrip detectors irradiated with neutrons to LHC upgrade doses [J].

Casse, G. ;

Allport, P. P. ;

Greenall, A. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2007, 581 (1-2) :318-321

[3]

Fadeyev V., 2009, NUCL SCI S

[4] Testing of bulk radiation damage of n-in-p silicon sensors for very high radiation environments [J].

Hara, K. ;

Affolder, A. A. ;

Allport, P. P. ;

Bates, R. ;

Betancourt, C. ;

Bohm, J. ;

Brown, H. ;

Buttar, C. ;

Carter, J. R. ;

Casse, G. ;

Chen, H. ;

Chilingarov, A. ;

Cindro, V. ;

Clark, A. ;

Dawson, N. ;

DeWilde, B. ;

Doherty, F. ;

Dolezal, Z. ;

Eklund, L. ;

Fadeyev, V. ;

Ferrere, D. ;

Fox, H. ;

French, R. ;

Garcia, C. ;

Gerling, M. ;

Sevilla, S. Gonzalez ;

Gorelov, I. ;

Greenall, A. ;

Grillo, A. A. ;

Hamasaki, N. ;

Hatano, H. ;

Hoeferkamp, M. ;

Hommels, L. B. A. ;

Ikegami, Y. ;

Jakobs, K. ;

Kierstead, J. ;

Kodys, P. ;

Koehler, M. ;

Kohriki, T. ;

Kramberger, G. ;

Lacasta, C. ;

Li, Z. ;

Lindgren, S. ;

Lynn, D. ;

Maddock, P. ;

Mandic, I. ;

Martinez-McKinney, F. ;

Marti i Garcia, S. ;

Maunu, R. ;

McCarthy, R. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2011, 636 :S83-S89

[5]

Li Z., 2002, NUCL SCI S

[6] Observation of full charge collection efficiency in heavily irradiated n plus p strip detectors irradiated up to 3 x 1015 neq/cm2 [J].

Mandic, Igor ;

Cindro, Vladimir ;

Gorisek, Andrej ;

Kramberger, Gregor ;

Mikuz, Marko ;

Zavrtanik, Marko .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2010, 612 (03) :474-477

[7] Charge collection measurements on slim-edge microstrip detectors [J].

Mori, R. ;

Bruzzi, M. ;

Cartiglia, M. ;

Christophersen, M. ;

Ely, S. ;

Martinez-McKinney, F. ;

Phlips, B. ;

Sadrozinski, H. F. -W. ;

Fadeyev, V. .

JOURNAL OF INSTRUMENTATION, 2012, 7

[8] Analysis of Processing Mechanism in Stealth Dicing of Ultra Thin Silicon Wafer [J].

Ohmura, Etsuji ;

Kumagai, Masayoshi ;

Nakano, Makoto ;

Kuno, Koji ;

Fukumitsu, Kenshi ;

Morita, Hideki .

JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING, 2008, 2 (04) :540-549

[9] Development of n-on-p silicon sensors for very high radiation environments [J].

Unno, Y. ;

Affolder, A. A. ;

Allport, P. P. ;

Bates, R. ;

Betancourt, C. ;

Bohm, J. ;

Brown, H. ;

Buttar, C. ;

Carter, J. R. ;

Casse, G. ;

Chen, H. ;

Chilingarov, A. ;

Cindro, V. ;

Clark, A. ;

Dawson, N. ;

DeWilde, B. ;

Dolezal, Z. ;

Eklund, L. ;

Fadeyev, V. ;

Ferrere, D. ;

Fox, H. ;

French, R. ;

Garcia, C. ;

Gerling, M. ;

Sevilla, S. Gonzalez ;

Gorelov, I. ;

Greenall, A. ;

Grillo, A. A. ;

Hamasaki, N. ;

Hara, K. ;

Hatano, H. ;

Hoeferkamp, M. ;

Hommels, L. B. A. ;

Ikegami, Y. ;

Jakobs, K. ;

Kamada, S. ;

Kierstead, J. ;

Kodys, P. ;

Kohler, M. ;

Kohriki, T. ;

Kramberger, G. ;

Lacasta, C. ;

Li, Z. ;

Lindgren, S. ;

Lynn, D. ;

Mikestikova, M. ;

Maddock, P. ;

Mandic, I. ;

Marti i Garcia, S. ;

martinez-McKinney, F. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2011, 636 :S24-S30

[10]

Wright J., 2010, IEEE NUCL SCI S

← 1 →