Stitching interferometric measurement data for inspection of large optical components

被引：55

作者：

Sjödahl, M ^{[1
]}

Oreb, BF ^{[1
]}

机构：

[1] CSIRO Telecommun & Ind Phys, Lindfield, NSW 2070, Australia

来源：

OPTICAL ENGINEERING | 2002年 / 41卷 / 02期

关键词：

optical interferometry; image stitching; large aperture interferometry;

D O I：

10.1117/1.1430727

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An algorithm for stitching together a set of individual phase measurements into a unified larger phase map is presented. The set of individual phase maps results from scanning a component over the interferometer aperture and acquiring a measurement at each position. The algorithm is based on an iterative approach, where singular value decomposition is used to solve the rigid body movement problem between the different phase maps. The algorithm has been tested in numerical experiments and has been successfully applied to real data. (C) 2002 Society of Photo-Optical Instrumentation Engineers.

引用

页码：403 / 408

页数：6

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