Bulk AlN single crystal growth on foreign substrate and preparation of free-standing native seeds

被引:47
作者
Sumathi, R. Radhakrishnan [1 ]
机构
[1] Univ Munich, Dept Earth & Environm Sci, Crystallog Sect, D-80333 Munich, Germany
关键词
HIGH-QUALITY ALN; OPTICAL-PROPERTIES; EPITAXY; SURFACE; ALGAN; GAN; TEMPERATURE; TRANSITIONS;
D O I
10.1039/c2ce26599k
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Physical vapour transport growth of aluminium nitride (AlN) single crystals on silicon carbide (SiC) substrates has been optimised and crack-free, large-area, free-standing (0001) AlN wafers were prepared from the grown template crystals. 28 mm diameter single crystals without any polycrystalline surroundings were obtained. Different off-oriented substrates give rise to different growth modes. Sharp and symmetric line shapes of X-ray diffraction (XRD) rocking curves and high intense Raman phonon mode peaks prove high structural quality and homogeneity of the grown crystals. Full width at half maximum of the rocking curves is 72 arcsec for symmetric 00.2 reflection and 200 arcsec for asymmetric 10.3 reflection, representing a low screw as well as edge type threading dislocations. Wet chemical etching results also confirm the above XRD results and the estimated etch pit density is as low as 2-5 x 10(5) cm(-2). The growth surfaces of all the crystals show only Al-polarity as inferred by the etching analysis. The concentration of silicon and carbon impurities incorporated from the SiC substrate decreases with the growth length of the AlN crystals. These impurities might play a decisive role in determining the optical properties of the crystal and be responsible for the absence of near-bandgap excitonic luminescence. Confocal Raman spectra show only the phonon modes allowed by the selection rules for the measured symmetry. The observed E-2(high) phonon mode frequency very closely matches the reported stress-free phonon frequency of AlN. This work demonstrates that AlN templates prepared on SiC as a foreign substrate can be used as native seeds for the growth of further homo-epitaxial layers and crystalline boules.
引用
收藏
页码:2232 / 2240
页数:9
相关论文
共 37 条
[1]   Orientation-dependent properties of aluminum nitride single crystals [J].
Bickermann, M. ;
Heimann, P. ;
Epelbaum, B. M. .
PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 3, NO 6, 2006, 3 (06) :1902-1906
[2]   Faceting in AlN bulk crystal growth and its impact on optical properties of the crystals [J].
Bickermann, Matthias ;
Epelbaum, Boris M. ;
Filip, Octavian ;
Tautz, Barbara ;
Heimann, Paul ;
Winnacker, Albrecht .
PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 9, NO 3-4, 2012, 9 (3-4) :449-452
[3]   Growth of AlN bulk crystals on SiC seeds: Chemical analysis and crystal properties [J].
Bickermann, Matthias ;
Filip, Octavian ;
Epelbaum, Boris M. ;
Heimann, Paul ;
Feneberg, Martin ;
Neuschl, Benjamin ;
Thonke, Klaus ;
Wedler, Elke ;
Winnacker, Albrecht .
JOURNAL OF CRYSTAL GROWTH, 2012, 339 (01) :13-21
[4]   UV transparent single-crystalline bulk AlN substrates [J].
Bickermann, Matthias ;
Epelbaum, Boris M. ;
Filip, Octavian ;
Heimann, Paul ;
Nagata, Shunro ;
Winnacker, Albrecht .
PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 7, NO 1, 2010, 7 (01) :21-24
[5]  
Cabrera N., 1958, Growth and Perfection of Crystals. Proceedings of an International Conference on Crystal Growth, P393
[6]   Characterization of dislocation arrays in AlN single crystals grown by PVT [J].
Dalmau, Rafael ;
Moody, Baxter ;
Xie, Jinqiao ;
Collazo, Ramon ;
Sitar, Zlatko .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2011, 208 (07) :1545-1547
[7]   Phonon dispersion and Raman scattering in hexagonal GaN and AlN [J].
Davydov, VY ;
Kitaev, YE ;
Goncharuk, IN ;
Smirnov, AN ;
Graul, J ;
Semchinova, O ;
Uffmann, D ;
Smirnov, MB ;
Mirgorodsky, AP ;
Evarestov, RA .
PHYSICAL REVIEW B, 1998, 58 (19) :12899-12907
[8]   Structural and optical properties of thick freestanding AlN films prepared by hydride vapor phase epitaxy [J].
Freitas, J. A., Jr. ;
Culbertson, J. C. ;
Mastro, M. A. ;
Kumagai, Y. ;
Koukitu, A. .
JOURNAL OF CRYSTAL GROWTH, 2012, 350 (01) :33-37
[9]   Properties of Mid-Ultraviolet Light Emitting Diodes Fabricated from Pseudomorphic Layers on Bulk Aluminum Nitride Substrates [J].
Grandusky, James R. ;
Gibb, Shawn R. ;
Mendrick, Mark C. ;
Schowalter, Leo J. .
APPLIED PHYSICS EXPRESS, 2010, 3 (07)
[10]  
Harris G. L., 1995, PROPERTIES SILICON C, P4