Micromachined silicon cantilever paddles with piezoresistive readout for flow sensing

被引：27

作者：

Su, Y

Evans, AGR

Brunnschweiler, A

机构：

[1] Dept. of Electronics and Comp. Sci., University of Southampton, Highfield

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1996年 / 6卷 / 01期

关键词：

D O I：

10.1088/0960-1317/6/1/015

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A group of piezoresistive silicon cantilever paddles have been fabricated, each of which consists of a paddle square which is attached by two cantilever arms, and a piezoresistive sensor on the root surface of each arm. The process involves a combination of wet and dry etching techniques. The fabricated cantilever paddles are 200-550 mu m long and 25-40 mu m wide with a paddle square of 100-250 mu m. The measured sensitivity (Delta R/R/y(0)) of the cantilever devices is 0.23-2.91 x 10(-6) nm(-1), which is in good agreement with the values predicted by our derived formula. These cantilever paddles have potential application in flow sensors.

引用

页码：69 / 72

页数：4

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