The influence of electrode metals and its configuration on the response of tin oxide thin film CO sensor

被引：18

作者：

Durrani, SMA ^{[1
]}

机构：

[1] King Fahd Univ Petr & Minerals, Dept Phys, Dhahran 31261, Saudi Arabia

来源：

TALANTA | 2006年 / 68卷 / 05期

关键词：

thin film; CO sensor; SnO2; semiconductor sensor;

D O I：

10.1016/j.talanta.2005.08.015

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Thin films of tin oxide were deposited by electron beam evaporation. The effects of the electrode materials (Ag, Al, An and Pt) and different electrode configurations on the CO-sensing of tin oxide thin films were investigated. The Pt and An electrodes with bottom electrode configuration show much higher response than Ag and Al electrodes. The sensor response and recovery times have also been measured. The films were characterized using X-ray diffraction and X-ray photoelectron spectroscopy. All the films were found to be amorphous. It was found that the CO-sensing properties depend both on the electrode materials and configuration. (c) 2005 Published by Elsevier B.V.

引用

页码：1732 / 1735

页数：4

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