A novel, single-mode piezoceramic plate actuator for ultrasonic linear motors

被引：97

作者：

Vyshnevskyy, E ^{[1
]}

Kovalev, S ^{[1
]}

Wischnewskiy, W ^{[1
]}

机构：

[1] Phys Instrumente GmbH & Co KG, D-76228 Karlsruhe, Germany

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2005年 / 52卷 / 11期

关键词：

D O I：

10.1109/TUFFC.2005.1561674

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

A new type of piezoelectric plate actuator for ultrasonic linear motors has been developed. These new piezoelectric actuators use the principle of asymmetric resonant excitation of the piezoceramic plate in a special resonant mode consisting of a standing two-dimensional extensional wave in a piezoceramic plate. The behavior of the actuator has been simulated with finite-element method (FEM) software and the simulation results checked with single-point contact measurements on the surface of the actuator. This paper describes this work and closes by describing the new ultrasonic translation stages based on this design.

引用

页码：2047 / 2053

页数：7

共 11 条

[1] ULTRASONIC ROTARY MOTOR USING LONGITUDINAL AND BENDING MULTIMODE VIBRATOR WITH MODE-COUPLING CAUSED BY EXTERNAL ADDITIONAL ASYMMETRY [J].

AOYAGI, M ;

TOMIKAWA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9B) :4190-4193

[2]

Bansevicius R., 1979, USSR patent, Patent No. 851560

[3] Piezoelectric micromotor using a metal-ceramic composite structure [J].

Koc, B ;

Bouchilloux, P ;

Uchino, K .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2000, 47 (04) :836-843

[4]

NANOMOTION LTD, 1997, Patent No. 5616980

[5]

*PI CER GMBH, PIEZ PMR 40 08

[6] SAME PHASE DRIVE-TYPE ULTRASONIC MOTORS USING 2 DEGENERATE BENDING VIBRATION MODES OF A DISK [J].

TAKANO, T ;

TOMIKAWA, Y ;

KUSAKABE, C .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1992, 39 (02) :180-186

[7]

VISHNEVSKY L, 1984, Patent No. 4453103

[8]

Vishnevsky L.G.V., 1981, USSR patent, Patent No. 851560

[9]

WISCHNEWSKIY W, 2002, ACTUATOR 2002

[10] PIEZOELECTRIC LINEAR MOTORS FOR DRIVING HEAD ELEMENT OF CD-ROM [J].

YABUKI, A ;

AOYAGI, M ;

TOMIKAWA, Y ;

TAKANO, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (9B) :5365-5369

← 1 2 →