[1] Univ Freiburg, Inst Microsyst Engn IMTEK, D-79110 Freiburg, Germany
[2] Univ Freiburg, Sch Soft Matter Res, Freiburg Inst Adv Studies FRIAS, D-79104 Freiburg, Germany
[3] Univ Twente, MESA Inst Nanotechnol, NL-7500 AE Enschede, Netherlands
[4] Xidian Univ, Sch Microelect, State Key Discipline Lab Wide Band Gap Semicond T, Xian 710071, Peoples R China
[5] Ikerbasque, Basque Fdn Sci, E-48011 Bilbao, Spain
[6] Univ Basque Country UPV EHU, POLYMAT, E-20018 Donostia San Sebastian, Spain