Determination of the pore size and the vertical structure of nanoporous aluminum oxide membranes

被引：11

作者：

Heilmann, A

Altmann, F

Katzer, D

Müller, F

Sawitowski, T

Schmid, G

机构：

[1] Fraunhofer Inst Werkstoffmech, D-06120 Halle, Germany

[2] Univ Essen Gesamthsch, Inst Anorgan Chem, D-45117 Essen, Germany

来源：

APPLIED SURFACE SCIENCE | 1999年 / 144-45卷

关键词：

nanomaterials; aluminum oxide; nanoporous membranes; focussed ion beam technology;

D O I：

10.1016/S0169-4332(98)00899-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The pore geometry of nanoporous aluminum oxide membranes which were prepared by anodization of aluminum in polyprotic acids were observed using focused ion beam technology (FIB) and high resolution scanning electron microscopy (SEM). For demonstration of the columnar structure of the nanopores, depth profiles were prepared with the FIB technology. Based on the detailed information about the pore geometry, the inner surfaces of the pores were calculated. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：682 / 685

页数：4

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