Investigation of capacitively coupled argon plasma driven at various frequencies and validation of surface waves excitation

被引：11

作者：

Abdel-Fattah, E. ^{[1
,2
]}

机构：

[1] Zagazig Univ, Fac Sci, Dept Phys, Zagazig 44519, Egypt

[2] Salman bin AbdulAziz Univ, Coll Sci, Dept Phys, Al Kharj 11942, Saudi Arabia

来源：

PHYSICS LETTERS A | 2013年 / 377卷 / 3-4期

关键词：

Capacitively coupled plasma; Electron energy distribution function; Very high frequency; Surface wave plasma; HEATING-MODE TRANSITION; LARGE-AREA; STANDING-WAVE; 13.56; MHZ; DISCHARGES;

D O I：

10.1016/j.physleta.2012.11.014

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The influence of excitation frequency (13.56-96 MHz) on the characteristics of capacitively coupled argon plasma is investigated by means of Langmuir probe and a high-voltage probe. Measurements are performed in argon pressure of 40 and 60 mTorr at a fixed discharge voltage V-pp = 200 V. The measured electron energy distribution function EEPFs are a bi-Maxwellian type irrespective of the driving frequency and gas pressure. The electron density and temperatures show peak over frequency range of 54-72 MHz, beyond which it decreases. The non-monotonic dependences of plasma parameters with driving frequency were interpreted in terms of excited surface wave excited at the powered electrode. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：297 / 302

页数：6

共 14 条

[1] Influence of excitation frequency on the electron distribution function in capacitively coupled discharges in argon and helium [J].

Abdel-Fattah, E ;

Sugai, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2003, 42 (10) :6569-6577

[2] Electron heating mode transition observed in a very high frequency capacitive discharge [J].

Abdel-Fattah, E ;

Sugai, H .

APPLIED PHYSICS LETTERS, 2003, 83 (08) :1533-1535

[3] Electromagnetic effects in high-frequency capacitive discharges used for plasma processing [J].

Chabert, P. .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (03) :R63-R73

[4]

Colgan M. J., 1994, Plasma Sources, Science and Technology, V3, P181, DOI 10.1088/0963-0252/3/2/009

[5] Surface wave eigenmodes in a finite-area plane microwave plasma [J].

Ghanashev, I ;

Nagatsu, M ;

Sugai, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (1A) :337-344

[6] ABNORMALLY LOW ELECTRON-ENERGY AND HEATING-MODE TRANSITION IN A LOW-PRESSURE ARGON RF DISCHARGE AT 13.56 MHZ [J].

GODYAK, VA ;

PIEJAK, RB .

PHYSICAL REVIEW LETTERS, 1990, 65 (08) :996-999

[7] Stochastic electron heating in bounded radio-frequency plasmas [J].

Kaganovich, ID ;

Kolobov, VI ;

Tsendin, LD .

APPLIED PHYSICS LETTERS, 1996, 69 (25) :3818-3820

[8] ON THE LONGITUDINAL VOLTAGE DISTRIBUTION IN RADIO-FREQUENCY-DISCHARGED CO2-LASERS WITH LARGE-AREA ELECTRODES [J].

LAPUCCI, A ;

ROSSETTI, F ;

CIOFINI, M ;

ORLANDO, G .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1995, 31 (08) :1537-1542

[9]

Lieberman M. A., 2005, PRINCIPLES PLASMA DI

[10] Standing wave and skin effects in large-area, high-frequency capacitive discharges [J].

Lieberman, MA ;

Booth, JP ;

Chabert, P ;

Rax, JM ;

Turner, MM .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 2002, 11 (03) :283-293

← 1 2 →