Carbon sputtering of polymer-like amorphous carbon by swift heavy ions

被引：31
作者：
Pawlak, F
Dufour, C
Laurent, A
Paumier, E
Perrière, J
Stoquert, JP
Toulemonde, M
机构：
[1] CEA, CNRS, Lab Commun, CIRIL, F-14070 Caen 5, France
[2] Inst Sci Mat & Rayonnement, ESA, CNRS 6007, LERMAT, F-14050 Caen, France
[3] Univ Paris 07, URA 17, GPS, F-75251 Paris 05, France
[4] Univ Paris 06, URA 17, GPS, F-75251 Paris 05, France
[5] CNRS, Lab PHASE, F-67037 Strasbourg 2, France
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1999年 / 151卷 / 1-4期
关键词：
D O I：
10.1016/S0168-583X(99)00089-0
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Thin films of "polymer-like" deuterated amorphous carbon have been irradiated at GANIL (Caen, France) by several swift heavy ion beams : S, Ar, Nb, Sn, Pb and U in the energy range between 2 and 10 MeV/amu, covering the electronic stopping power (S-e) range between I and 13 keV/nm. Using Rutherford backscattering spectrometry, the carbon content remaining in the film has been determined versus fluence for several values of S-e. The deduced yield of carbon sputtering increases significantly above a S-e threshold value of 2.5 +/- 1.0 keV nm(-1), which is larger than the S-e threshold value of deuterium effusion (0.75 +/- 0.35 keV nm(-1)). Using the thermal spike model, an effective temperature around 2800 K is defined for carbon sputtering in polymer-like amorphous carbon in the S-e regime, (C) 1999 Elsevier Science B.V. All rights reserved.
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收藏
页码：140 / 145
页数：6
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