Boron nitride microfibers grown by plasma-assisted laser chemical vapor deposition without a metal catalyst

被引：6
作者：
Komatsu, S
Kazami, D
Tanaka, H
Shimizu, Y
Moriyoshi, Y
Shiratani, M
Okada, K
机构：
[1] Natl Inst Mat Sci, Adv Mat Lab, Tsukuba, Ibaraki 3050044, Japan
[2] Hosei Univ, Coll Engn, Dept Mat Sci, Koganei, Tokyo 1848584, Japan
[3] Kyushu Univ, Grad Sch Informat Sci & Elect Engn, Dept Elect, Fukuoka 8128581, Japan
来源：
APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 15期
关键词：
D O I：
10.1063/1.2188381
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Boron nitride fibers were found to grow on polycrystalline nickel and Si(100) substrates by plasma-assisted laser chemical vapor deposition from B2H6+NH3 using an excimer laser at 193 nm. Their diameter was typically a few hundreds of nanometers, while the length was a few tens of micrometers. They were stoichiometric or boron-rich BN in chemical composition. When the substrate was rotated during deposition, spiral fibers were found to grow. We conclude that they grew with the help of laser light by other than the vapor - liquid - solid mechanism.
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