High-performance ZnO nanoflake moisture sensor

被引：56

作者：

Bu, Ian Y. Y. ^{[1
,2
]}

Yang, Chih-Chin ^{[1
]}

机构：

[1] Natl Kaohsiung Marine Univ, Dept Microelect Engn, Kaohsiung 81157, Taiwan

[2] Natl Cheng Kung Univ, Res Ctr Energy Technol & Strategy, Tainan 70101, Taiwan

来源：

SUPERLATTICES AND MICROSTRUCTURES | 2012年 / 51卷 / 06期

关键词：

Zinc oxide; Humidity sensor; Nanoflake; ZINC-OXIDE NANOWIRES; SENSING PROPERTIES; FILMS; GROWTH;

D O I：

10.1016/j.spmi.2012.03.009

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Humidity control is an important issue across variety of industries. In this study, a novel zinc oxide (ZnO) flake-based humidity sensor was fabricated and characterized. It was found that fast response sensor can be achieved by substituting conventional sputter ZnO thin films with nano-flakes. It is proposed that the enhancement in dynamic performance originate from the high surface area offered by the nanoflakes. (c) 2012 Elsevier Ltd. All rights reserved.

引用

页码：745 / 753

页数：9

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