Low loss high index contrast nanoimprinted polysiloxane waveguides

被引：36

作者：

Han, Ting ^{[1
]}

Madden, Steve ^{[1
]}

Zhang, Mathew ^{[1
]}

Charters, Robbie ^{[2
]}

Luther-Davies, Barry ^{[1
]}

机构：

[1] Australian Natl Univ, Laser Phys Ctr, Canberra, ACT 0200, Australia

[2] RPO Inc, Canberra, ACT 0200, Australia

来源：

OPTICS EXPRESS | 2009年 / 17卷 / 04期

基金：

澳大利亚研究理事会;

关键词：

FABRICATION; LAYER;

D O I：

10.1364/OE.17.002623

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Nanoimprint lithography is gaining rapid acceptance in fields as diverse as microelectronics and microfluidics due to its simplicity high resolution and low cost. These properties are critically important for the fabrication of photonic devices, where cost is often the major inhibiting deployment factor for high volume applications. We report here on the use of nanoimprint technology to fabricate low loss broadband high index contrast waveguides in a Polysiloxane polymer system for the first time. (C) 2009 Optical Society of America

引用

页码：2623 / 2630

页数：8

共 23 条

[1] Ultralow loss high delta silica germania planar waveguides [J].

Bellman, RA ;

Bourdon, G ;

Alibert, G ;

Beguin, A ;

Guiot, E ;

Simpson, LB ;

Lehuede, P ;

Guiziou, L ;

LeGuen, E .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2004, 151 (08) :G541-G547

[2] ORMOCER®s for optical interconnection technology [J].

Buestrich, R ;

Kahlenberg, F ;

Popall, M ;

Dannberg, P ;

Müller-Fiedler, R ;

Rösch, O .

JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2001, 20 (02) :181-186

[3]

CHARTERS R, 2007, COMMUNICATION

[4] Fabrication and replication of polymer integrated optical devices using electron-beam lithography and soft lithography [J].

Huang, YY ;

Paloczi, GT ;

Yariv, A ;

Zhang, C ;

Dalton, LR .

JOURNAL OF PHYSICAL CHEMISTRY B, 2004, 108 (25) :8606-8613

[5] Fabrication of ridge waveguides by UV embossing and stamping of sol-gel hybrid materials [J].

Kim, WS ;

Lee, JH ;

Shin, SY ;

Bae, BS ;

Kim, YC .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2004, 16 (08) :1888-1890

[6] Polysiloxane optical waveguide layer integrated in printed circuit board [J].

Kopetz, S ;

Rabe, E ;

Kang, WJ ;

Neyer, A .

ELECTRONICS LETTERS, 2004, 40 (11) :668-669

[7] PDMS-based optical waveguide layer for integration in electrical-optical circuit boards [J].

Kopetz, Stefan ;

Cai, Dengke ;

Rabe, Erik ;

Neyer, Andreas .

AEU-INTERNATIONAL JOURNAL OF ELECTRONICS AND COMMUNICATIONS, 2007, 61 (03) :163-167

[8] Polymer variable optical attenuator arrays: Pathway from material platform to qualified telecom product [J].

Kowalczyk, T ;

Blum, R .

LINEAR AND NONLINEAR OPTICS OF ORGANIC MATERIALS IV, 2004, 5517 :50-61

[9] Effect of size and roughness on light transmission in a Si/SiO2 waveguide:: Experiments and model [J].

Lee, KK ;

Lim, DR ;

Luan, HC ;

Agarwal, A ;

Foresi, J ;

Kimerling, LC .

APPLIED PHYSICS LETTERS, 2000, 77 (11) :1617-1619

[10] Thin-film structures induced by electrostatic field and substrate kinetic constraint [J].

Lu, W ;

Kim, D .

APPLIED PHYSICS LETTERS, 2006, 88 (15)

← 1 2 3 →