Gas sensing characteristics of SnO2 thin film fabricated by thermal oxidation of a Sn/Pt double layer

被引：25

作者：

Shim, CH

Lee, DS

Hwang, SI

Lee, MB

Huh, JS

Lee, DD ^{[1
]}

机构：

[1] Kyungpook Natl Univ, Sch Elect & Elect Engn, Taegu 702701, South Korea

[2] Elect & Telecommun Res Inst, Microsyst Team, Taejon 305600, South Korea

[3] Kyungpook Natl Univ, Dept Met Engn, Taegu 702701, South Korea

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2002年 / 81卷 / 2-3期

关键词：

SnO2; thermal oxidation; double layer; long-term stability;

D O I：

10.1016/S0925-4005(01)00949-2

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

SnO2 thin film with homogeneously dispersed nano-crystallite Pt particles was reliably prepared via simple thermal oxidation of a Sn/Pt double layer on Si substrate oxidized. Its surface phase and morphology were probed using some surface sensitive tools such as X-ray diffraction (XRD). atomic force microscopy (AFM) and scanning electron microscopy (SEM). The electrical response of SnO2, thin films to the i-C4H10 gas was systematically investigated at a wide range of temperatures and gas concentrations. In particular. a long-term stability test of the fabricated Pt/SnO2 thin films for the i-C4H10 gas proved its applicability as a reliable gas sensor because of its higher sensing stability than the conventional Pt/SnO2 films over a long period of run time. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：176 / 181

页数：6

共 14 条

[1] TIN OXIDE MICROSENSOR FOR LPG MONITORING [J].

CHUNG, WY ;

SHIM, CH ;

CHOI, SD ;

LEE, DD .

SENSORS AND ACTUATORS B-CHEMICAL, 1994, 20 (2-3) :139-143

[2]

Cullity BD, 1978, ELEMENTS XRAY DIFFRA

[3] Gas identification using micro gas sensor array and neural-network pattern recognition [J].

Hong, HK ;

Shin, HW ;

Park, HS ;

Yun, DH ;

Kwon, CH ;

Lee, KC ;

Kim, ST ;

Moriizumi, T .

SENSORS AND ACTUATORS B-CHEMICAL, 1996, 33 (1-3) :68-71

[4]

JARZEBSKI ZM, 1972, OXIDE SEMICONDUCTORS, P252

[5] GAS-SENSING CHARACTERISTICS OF SNO2-X THIN-FILM WITH ADDED PT FABRICATED BY THE DIPPING METHOD [J].

LEE, DD ;

CHUNG, WY .

SENSORS AND ACTUATORS, 1989, 20 (03) :301-305

[6]

Madou M.J., 1989, CHEM SENSING SOLID S, P35

[7] Microstructure and gas-sensing properties of(Sn,Ti)O2 thin films deposited by RGTO technique [J].

Radecka, M ;

Przewoznik, J ;

Zakrzewska, K .

THIN SOLID FILMS, 2001, 391 (02) :247-254

[8]

Rahaman M.N., 1995, CERAMIC PROCESSING S, P473

[9]

Sberveglieri G., 1991, TRANSDUCERS '91. 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers (Cat. No.91CH2817-5), P165, DOI 10.1109/SENSOR.1991.148829

[10] WO3 SPUTTERED THIN-FILMS FOR NOX MONITORING [J].

SBERVEGLIERI, G ;

DEPERO, L ;

GROPPELLI, S ;

NELLI, P .

SENSORS AND ACTUATORS B-CHEMICAL, 1995, 26 (1-3) :89-92

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