Optical beamsteering using an 8 x 8 MEMS phased array with closed-loop interferometric phase control

被引：63

作者：

Chan, Trevor K. ^{[1
]}

Megens, Mischa ^{[1
]}

Yoo, Byung-Wook ^{[2
]}

Wyras, John ^{[2
]}

Chang-Hasnain, Connie J. ^{[2
]}

Wu, Ming C. ^{[2
]}

Horsley, David A. ^{[1
]}

机构：

[1] Univ Calif Davis, Dept Mech & Aerosp Engn, Davis, CA 95616 USA

[2] Univ Calif Berkeley, Dept Elect & Comp Engn, Berkeley, CA 94720 USA

来源：

OPTICS EXPRESS | 2013年 / 21卷 / 03期

关键词：

10;

D O I：

10.1364/OE.21.002807

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a high-speed optical beamsteering system based on an 8x8 MEMS phased array. The system incorporates an in situ interferometer that provides a real-time, dynamic measure of the phase of each mirror in the array during beamsteering. A closed-loop phase-control algorithm results in <pi/100 mirror phase accuracy and far field beam steering is shown. Stroboscopic measurement capabilities are demonstrated which allow us to show feedforward control to eliminate micromirror ringing. (C) 2013 Optical Society of America

引用

页码：2807 / 2815

页数：9

共 10 条

[1]

Bifano T. G., 2005, P SOC PHOTO-OPT INS, V5895

[2] A micromachined 2D positioner with electrothermal actuation and sub-nanometer capacitive sensing [J].

Chu, LL ;

Gianchandani, YB .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (02) :279-285

[3] Experimental study of phased array beam steering characteristics [J].

Clay, AC ;

Wooh, SC ;

Azar, L ;

Wang, JY .

JOURNAL OF NONDESTRUCTIVE EVALUATION, 1999, 18 (02) :59-71

[4] Simultaneous actuation and displacement sensing for electrostatic drives [J].

Dong, Jingyan ;

Ferreira, Placid M. .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2008, 18 (03)

[5]

Goodman J. W, 1996, INTRO FOURIER OPTICS

[6] Theoretical analysis of subwavelength high contrast grating reflectors [J].

Karagodsky, Vadim ;

Sedgwick, Forrest G. ;

Chang-Hasnain, Connie J. .

OPTICS EXPRESS, 2010, 18 (16) :16973-16988

[7] A Review of Phased Array Steering for Narrow-Band Electrooptical Systems [J].

McManamon, Paul F. ;

Bos, Philip J. ;

Escuti, Michael J. ;

Heikenfeld, Jason ;

Serati, Steve ;

Xie, Huikai ;

Watson, Edward A. .

PROCEEDINGS OF THE IEEE, 2009, 97 (06) :1078-1096

[8] High-efficiency liquid-crystal optical phased-array beam steering [J].

Resler, DP ;

Hobbs, DS ;

Sharp, RC ;

Friedman, LJ ;

Dorschner, TA .

OPTICS LETTERS, 1996, 21 (09) :689-691

[9] PRESHAPING COMMAND INPUTS TO REDUCE SYSTEM VIBRATION [J].

SINGER, NC ;

SEERING, WP .

JOURNAL OF DYNAMIC SYSTEMS MEASUREMENT AND CONTROL-TRANSACTIONS OF THE ASME, 1990, 112 (01) :76-82

[10]

Yoo B.-W., OPT EXPRESS UNPUB

← 1 →