Development of silicon microheaters for chemoresistive gas sensors

被引：5

作者：

Brida, S ^{[1
]}

Ferrario, L ^{[1
]}

Giacomozzi, F ^{[1
]}

Giusti, D ^{[1
]}

Guarnieri, V ^{[1
]}

Margesin, B ^{[1
]}

Pignatel, GU ^{[1
]}

Soncini, G ^{[1
]}

Vasiliev, A ^{[1
]}

Verzellesi, G ^{[1
]}

Zen, M ^{[1
]}

机构：

[1] IRST, ITC, I-38050 Trent, Italy

来源：

DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2 | 1999年 / 3680卷

关键词：

microheater; gas sensor; finite-element simulation;

D O I：

10.1117/12.341164

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report on the design, fabrication, and characterisation of a microheater module for chemoresistive, metal-oxide semiconductor gas sensors, consisting of a dielectric stacked membrane, micromachined from bulk silicon and with an embedded polysilicon resistor heater. Fabricated structures exhibit excellent heating efficiency, requiring only 30 mW to achieve a temperature of 500 C. Measured electrothermal characteristics are in good agreement with the outcomes of 3D numerical simulations.

引用

页码：964 / 968

页数：5

共 6 条

[1] Thermal and mechanical aspects for designing micromachined low-power gas sensors [J].