共 21 条
[1]
A TECHNIQUE FOR THE DETERMINATION OF STRESS IN THIN-FILMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1983, 1 (04)
:1364-1366
[3]
Dieter George Ellwood, 1976, Mechanical Metallurgy
[4]
GADELHAK M, 2002, MEMS HDB, P3
[7]
KOMAI K, 1994, T JAPAN SOC MECH E A, V60, P52
[8]
LAMPMAN SR, 1996, ASM HDB FATIGUE FRAC, V19, P795