Fast multiphoton microfabrication of freeform polymer microstructures by spatiotemporal focusing and patterned excitation

被引：49

作者：

Li, Yi-Cheng ^{[1
]}

Cheng, Li-Chung ^{[1
]}

Chang, Chia-Yuan ^{[1
]}

Lien, Chi-Hsiang ^{[2
]}

Campagnola, Paul J. ^{[3
]}

Chen, Shean-Jen ^{[2
,4
,5
]}

机构：

[1] Natl Cheng Kung Univ, Dept Photon, Tainan 701, Taiwan

[2] Natl Cheng Kung Univ, Dept Engn Sci, Tainan 701, Taiwan

[3] Univ Wisconsin, Dept Biomed Engn, Madison, WI 53706 USA

[4] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Tainan 701, Taiwan

[5] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Tainan 701, Taiwan

来源：

OPTICS EXPRESS | 2012年 / 20卷 / 17期

关键词：

FEMTOSECOND LASER-PULSES; PILE PHOTONIC CRYSTAL; IN-SITU SYNTHESIS; 2-PHOTON; FABRICATION; MICROSCOPY; NANOCOMPOSITES; SYSTEM;

D O I：

10.1364/OE.20.019030

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

One of the limits of conventional scanning multiphoton microfabrication is its low throughput due to point-by-point processing. In order to surpass this limit, a multiphoton microfabrication system based on spatiotemporal focusing and patterned excitation has been developed to quickly provide three-dimensional (3D) freeform polymer microstructures. 3D freeform polymer microstructures using Rose Bengal as the photoinitiator are created by sequentially stacking two-dimensional fabricating patterns. The size of each fabrication area can be larger than 300 x 170 mu m(2) (full width at half maximum). Compared to conventional scanning multiphoton excitation and fixed mask pattern generation, this approach offers freeform microstructures and a greater than three-order increase in fabrication speed. Furthermore, the system is capable of optically sectioning the fabricated microstructures for providing 3D inspection. (C) 2012 Optical Society of America

引用

页码：19030 / 19038

页数：9

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