An Evaluation Model for Analyzing the Overlay Error of Computer-generated Holograms

被引：6

作者：

Gan, Zihao ^{[1
]}

Peng, Xiaoqiang ^{[1
,2
]}

Hong, Huajie ^{[1
]}

机构：

[1] Natl Univ Def Technol, Coll Intelligence Sci, Changsha 410073, Peoples R China

[2] Natl Univ Def Technol, Lab Sci & Technol Integrated Logist Support, Changsha 410073, Peoples R China

来源：

CURRENT OPTICS AND PHOTONICS | 2020年 / 4卷 / 04期

关键词：

Computer-generated holograms; Overlay error; Evaluation model; Wavefront accuracy; FREEFORM; FABRICATION;

D O I：

10.3807/COPP.2020.4.4.277

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Computer-generated holograms (CGH) are the core devices to solve the problem of freeform surface measurement. In view of the overlay error introduced in the manufacturing process of CGH, this paper proposes an evaluation model for analyzing the overlay error of CGH. The detection method of extracting CGH profile information by an ultra-depth of field micro-measurement system is presented. Furthermore, based on the detection method and technical scheme, the effect of overlay error on the wavefront accuracy of CGH can be evaluated.

引用

页码：277 / 285

页数：9

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