An Evaluation Model for Analyzing the Overlay Error of Computer-generated Holograms

Computer-generated holograms (CGH) are the core devices to solve the problem of freeform surface measurement. In view of the overlay error introduced in the manufacturing process of CGH, this paper proposes an evaluation model for analyzing the overlay error of CGH. The detection method of extracting CGH profile information by an ultra-depth of field micro-measurement system is presented. Furthermore, based on the detection method and technical scheme, the effect of overlay error on the wavefront accuracy of CGH can be evaluated.