Microstructure and mechanical properties of Cr1-xAlxN Coating

被引：0
|
作者：
Zhong, C. L. [1 ]
Luo, L. E. [1 ]
机构：
[1] Hunan Univ Technol, Dept Elect Sci & Informat Engn, Zhuzhou, Peoples R China
来源：
ADVANCED RESEARCH ON MATERIAL ENGINEERING, CHEMISTRY, BIOINFORMATICS II | 2012年 / 531卷
关键词：
Magnetron sputtering; Cr1-xAlxN coatings; microstructure; hardness; MAGNETRON-SPUTTERED CRALN; HARD COATINGS; CRN COATINGS; FILMS; RESISTANCE; OXIDATION; TIALN;
D O I：
10.4028/www.scientific.net/AMR.531.3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A series of Cr1-xAlxN coatings were deposited by reactive magnetron sputtering. The content, microstructure and the hardness of the thin films were characterized respectively with energy dispersive X-ray spectroscopy (EDS), X-ray diffraction (XRD) and nanoindentor. The effect of Al content on the microstructure and hardness was studied. It was found that Cr1-xAlxN compound coating exhibits a cubic structure with (1 1 1) preferred orientations and that the lattice parameter of Cr1-xAlxN coatings decrease with the increase of Al content. The hardness of Cr1-xAlxN compound coating is higher than that of CrN and increases with the increase of Al content.
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页码：3 / 6
页数：4
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