Bi1-xCaxMnO3 (x = 0, 0.1) films were grown by radio frequency (RF) magnetron sputtering on Si (100) and Si (111) substrates. The grown films were characterized by X-ray diffraction (XRD), energy dispersive X-ray spectroscopy (EDX), vibrating sample magnetometer (VSM) and dielectric studies. The XRD results indicate that the films are polycrystalline with monoclinic structure, however the Bi0.9Ca0.1MnO3/Si (100) showed higher crystalline quality than those developed on Si (111). It has been observed from VSM studies that Bi0.9Ca0.1MnO3/Si (100) system has high saturation magnetization of 1.0x10(-3) emu/cm(3) at room temperature (RT) compared to other films. Room temperature dielectric measurement also shows that Bi0.9Ca0.1MnO3/Si (100) has higher value of dielectric constant compared to the other films. (C) 2012 Elsevier B.V. All rights reserved.