Tip-shape effects on electrostatic force microscopy resolution

被引：53
作者：
Gómez-Moñivas, S
Froufe, LS
Carminati, R
Greffet, JJ
Sáenz, JJ
机构：
[1] Univ Autonoma Madrid, Dept Fis Mat Condensada, E-28049 Madrid, Spain
[2] Univ Autonoma Madrid, Inst Cienica Mat Nicolas Cabrera, E-28049 Madrid, Spain
[3] Ecole Cent Paris, CNRS, Lab Energet Mol & Mocroscop Combust, F-92295 Chatenay Malabry, France
来源：
NANOTECHNOLOGY | 2001年 / 12卷 / 04期
关键词：
D O I：
10.1088/0957-4484/12/4/323
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A detailed analysis of electrostatic interactions between a dc-biased tip and a metallic or insulating sample is presented. For inhomogeneous thin dielectric films, the scanning probe signal is shown to be proportional to the convolution between an effective surface profile and a response function of the microscope. Based on the properties of the response function, tip-shape effects on the lateral resolution in electrostatic force microscopy are discussed. For tip-sample distances D smaller than the tip radius R, the resolution is found to be proportional to rootDR.
引用
收藏
页码：496 / 499
页数：4
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