CHARACTERIZATION OF METAL OXIDE SENSOR THIN FILMS DEPOSITED BY SPRAY PYROLYSIS

被引：0

作者：

Khatami, S. M. Navid ^{[1
]}

Kuruppumullage, D. Nadun ^{[1
]}

Ilegbusi, Olusegun J. ^{[1
]}

机构：

[1] Univ Cent Florida, Dept Mech Mat & Aerosp Engn, Orlando, FL 32816 USA

来源：

PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2013, VOL 10 | 2014年

关键词：

Thin films; Spray pyrolysis; SnO2; ZnO; Structure; SNO2;

D O I：

暂无

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

Chemical Spray Pyrolysis (CSP) of ZnO and SnO2 is of interest for gas sensor applications. The structural properties of the deposited film can be strongly influenced by deposition conditions. In this work, two solutions consisting of Tin Chloride and Zinc Chloride was sprayed on a heated substrate, where temperature was varied from 400 degrees C to 450 degrees C for ZnO, and from 350 degrees C to 500 degrees C for SnO2. X-ray diffraction and scanning electron microscopy, indicating a non-homogenous-structured film formed at low temperature for both oxides. At 450 degrees C, a porous structure is observed for SnO2. This structure becomes homogenous at higher temperature. It was also found that at temperatures lower than 450 degrees C, substrate temperature has significant impact on the composition of the synthesized films.

引用

页数：7

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