Integrated shadow mask method for patterning small molecule organic semiconductors

被引：37

作者：

De Vusser, S

Steudel, S

Myny, K

Genoe, J

Heremans, P

机构：

[1] IMEC, PME, MCP, B-3001 Louvain, Belgium

[2] Katholieke Univ Leuven, Dept Elect Engn, Louvain, Belgium

来源：

APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 10期

关键词：

D O I：

10.1063/1.2182008

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have developed a simple and efficient method for patterning small molecule semiconductors for applications in the field of organic electronics. In our approach, a profile is created using a single layer of photoresist, defining the regions where the organic semiconductor is to be deposited. Subsequent deposition of a small molecule semiconductor results in a discontinuity of the semiconductor film at the photoresist edge. The resulting transistor characteristics have an off current that is systematically below 1 pA. We demonstrate both p-type and n-type organic thin-film transistors using this method, using pentacene and copper hexadecafluorophthalocyanine (F16CuPc), respectively. (c) 2006 American Institute of Physics.

引用

页数：3

共 17 条

[1] New air-stable n-channel organic thin film transistors [J].

Bao, ZA ;

Lovinger, AJ ;

Brown, J .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1998, 120 (01) :207-208

[2] Pentacene-based radio-frequency identification circuitry [J].

Baude, PF ;

Ender, DA ;

Haase, MA ;

Kelley, TW ;

Muyres, DV ;

Theiss, SD .

APPLIED PHYSICS LETTERS, 2003, 82 (22) :3964-3966

[3] Flexible active-matrix displays and shift registers based on solution-processed organic transistors [J].

Gelinck, GH ;

Huitema, HEA ;

Van Veenendaal, E ;

Cantatore, E ;

Schrijnemakers, L ;

Van der Putten, JBPH ;

Geuns, TCT ;

Beenhakkers, M ;

Giesbers, JB ;

Huisman, BH ;

Meijer, EJ ;

Benito, EM ;

Touwslager, FJ ;

Marsman, AW ;

Van Rens, BJE ;

De Leeuw, DM .

NATURE MATERIALS, 2004, 3 (02) :106-110

[4]

Gundlach D. J., 1999, International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318), P111, DOI 10.1109/IEDM.1999.823858

[5] Plastic transistors in active-matrix displays - The handling of grey levels by these large displays paves the way for electronic paper. [J].

Huitema, HEA ;

Gelinck, GH ;

van der Putten, JBPH ;

Kuijk, KE ;

Hart, CM ;

Cantatore, E ;

Herwig, PT ;

van Breemen, AJJM ;

de Leeuw, DM .

NATURE, 2001, 414 (6864) :599-599

[6]

Huitema HEA, 2002, ADV MATER, V14, P1201, DOI 10.1002/1521-4095(20020903)14:17<1201::AID-ADMA1201>3.0.CO

[7]

2-5

[8] Analog and digital circuits using organic thin-film transistors on polyester substrates [J].

Kane, MG ;

Campi, J ;

Hammond, MS ;

Cuomo, FP ;

Greening, B ;

Sheraw, CD ;

Nichols, JA ;

Gundlach, DJ ;

Huang, JR ;

Kuo, CC ;

Jia, L ;

Klauk, H ;

Jackson, TN .

IEEE ELECTRON DEVICE LETTERS, 2000, 21 (11) :534-536

[9]

Kelley TW, 2003, MATER RES SOC SYMP P, V771, P169

[10] High-performance OTFTs using surface-modified alumina dielectrics [J].

Kelley, TW ;

Boardman, LD ;

Dunbar, TD ;

Muyres, DV ;

Pellerite, MJ ;

Smith, TYP .

JOURNAL OF PHYSICAL CHEMISTRY B, 2003, 107 (24) :5877-5881

← 1 2 →