Variable size and shape distribution of ferroelectric nanoislands by chemical mechanical polishing

被引：7
作者：
Clemens, S
Röhrig, S
Rüdiger, A
Schneller, T
Waser, R
机构：
[1] Rhein Westfal TH Aachen, Inst Werkstoffe Elektrotech 2, D-52056 Aachen, Germany
[2] Forschungszentrum Julich, Dept ISG & IFF, CNR Ctr Nanoelectron Syst Informat Technol, D-52425 Julich, Germany
来源：
SMALL | 2006年 / 2卷 / 04期
关键词：
chemical mechanical polishing; chemical solution deposition; ferroelectrics; nanostructures; self-assembly;
D O I：
10.1002/smll.200500438
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
The controlled modification of the aspect ratio of ferroelectric nanograins by chemical mechanical polishing was investigated. It was observed that the chemical agents do not significantly affect the ferroelectric performance of the nanograins. It was observed that the grains polished for 15 s show strong and well-defined piezoelectric activity in magnitude and phase. It was found that this method can be used to nanomanipulate the shape of individual ferroelectric grains as well as ensembles in a low-k dielectric material.
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收藏
页码：500 / 502
页数：3
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