Analysis of femtosecond laser surface patterning on bulk single-crystalline diamond

被引：8

作者：

Lee, Graham C. B. ^{[2
]}

Su, Shi ^{[1
]}

Li, Jiangling ^{[1
]}

Sugden, Kate ^{[2
]}

Roohpour, Nima ^{[3
]}

Yan, Haixue ^{[3
]}

Ye, Haitao ^{[1
]}

机构：

[1] Aston Univ, Sch Engn & Appl Sci, Nanosci Res Grp, Birmingham B4 7ET, W Midlands, England

[2] Aston Univ, Aston Inst Photon Technol, Birmingham B4 7ET, W Midlands, England

[3] Univ London, Sch Engn & Mat Sci, London, England

来源：

JOURNAL OF EXPERIMENTAL NANOSCIENCE | 2012年 / 7卷 / 06期

基金：

英国工程与自然科学研究理事会;

关键词：

single-crystalline diamond; femtosecond laser patterning; graphitic; microstructures; MEMS; GRAPHITIZATION; DEPOSITION; CARBON;

D O I：

10.1080/17458080.2012.724181

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Preliminary work is reported on 2-D and 3-D microstructures written directly with a Yb:YAG 1026 nm femtosecond (fs) laser on bulk chemical vapour deposition (CVD) single-crystalline diamond. Smooth graphitic lines and other structures were written on the surface of a CVD diamond sample with a thickness of 0.7 mm under low laser fluences. This capability opens up the opportunity for making electronic devices and micro-electromechanical structures on diamond substrates. The fabrication process was optimised through testing a range of laser energies at a 100 kHz repetition rate with sub-500 fs pulses. These graphitic lines and structures have been characterised using optical microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy and atomic force microscopy. Using these analysis techniques, the formation of sp(2) and sp(3) bonds is explored and the ratio between sp(2) and sp(3) bonds after fs laser patterning is quantified. We present the early findings from this study and characterise the relationship between the graphitic line formation and the different fs laser exposure conditions.

引用

页码：662 / 672

页数：11