Automotive pressure sensors: Evolution of a micromachined sensor application

The automotive pressure sensor is one of the most widespread applications of a micromachined device, and has evolved into a relatively mature technology, expanding beyond its original use as an engine control sensor; into other vehicle control and diagnostic systems. The need for flexibility in various applications, low cost, high volume manufacturing capability, and survivability in harsh environments has strongly influenced sensor signal conditioning, calibration, element design, and packaging. Many of the issues affecting the development and commercialization of micromachined automotive pressure sensors are also relevant to other emerging microfabricated devices. The paper shows how the commercial success of a product using microfabricated technology is highly dependent upon other core competencies, beyond just the capability to perform the micromachining operations necessary to create the sensing device.