Influence of oxygen pressure on the structural, electrical and optical properties of Nb-doped ZnO thin films prepared by pulsed laser deposition

被引：30

作者：

Wu, Muying ^{[1
]}

Yu, Shihui ^{[2
]}

He, Lin ^{[1
]}

Zhang, Geng ^{[1
]}

Ling, Dongxiong ^{[1
]}

Zhang, Weifeng ^{[3
,4
]}

机构：

[1] Dongguan Univ Technol, Sch Elect Engn, Dongguan 523808, Guangdong, Peoples R China

[2] Tianjin Univ, Sch Elect & Informat Engn, Tianjin 300072, Peoples R China

[3] Henan Univ, Key Lab Photovolta Mat Henan Prov, Kaifeng 475004, Peoples R China

[4] Henan Univ, Sch Phys & Elect, Kaifeng 475004, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2014年 / 292卷

关键词：

NZO; Pulsed laser deposition; Oxygen pressure; TCO; OXIDE-FILMS; SUBSTRATE-TEMPERATURE; ZINC-OXIDE; TRANSPARENT; RF;

D O I：

10.1016/j.apsusc.2013.11.119

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Nb-doped zinc oxide (NZO) transparent conductive thin films with highly (0 0 2)-preferred orientation were deposited on glass substrates by pulsed laser deposition method in oxygen ambience under different oxygen pressures. The as-deposited films were characterized by X-ray diffraction (XRD), Field emission-scanning electron microscopy (FE-SEM), electrical and optical characterization techniques. It was found that a desirable amount of oxygen can reduce the related defect scattering and enhance the carrier mobility. The resistivity and average optical transmittance of the NZO thin films are of 10(-4) Omega cm and over 88%, respectively. The lowest electrical resistivity of the film is found to be about 4.37 x 10(-4) Omega cm. In addition, the influence of oxygen pressure on optical properties in NZO thin films was systematically studied as well. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：219 / 224

页数：6

共 37 条

[1]

Ables A., 1992, OPTICAL PROPERTIES S

[2] High temperature stability of postgrowth annealed transparent and conductive ZnO:Al films [J].

Bayraktaroglu, Burhan ;

Leedy, Kevin ;

Bedford, Robert .

APPLIED PHYSICS LETTERS, 2008, 93 (02)

[3] Effect of substrate temperature on structural, optical and electrical properties of pulsed laser ablated nanostructured indium oxide films [J].

Beena, D. ;

Lethy, K. J. ;

Vinodkumar, R. ;

Pillai, V. P. Mahadevan ;

Ganesan, V. ;

Phase, D. M. ;

Sudheer, S. K. .

APPLIED SURFACE SCIENCE, 2009, 255 (20) :8334-8342

[4] Microstructure and electrical property correlations in Ga:ZnO transparent conducting thin films [J].

Bhosle, V. ;

Narayan, J. .

JOURNAL OF APPLIED PHYSICS, 2006, 100 (09)

[5] Effect of chlorine doping on electrical and optical properties of ZnO thin films [J].

Chikoidze, E. ;

Nolan, M. ;

Modreanu, M. ;

Sallet, V. ;

Galtier, P. .

THIN SOLID FILMS, 2008, 516 (22) :8146-8149

[6] Optical and electrical properties of Bi doped ZnO thin films deposited by ultrasonic spray pyrolysis [J].

Chouikh, F. ;

Beggah, Y. ;

Aida, M. S. .

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2011, 22 (05) :499-505

[7] Optimization of Nb2O5/Ag/Nb2O5 multilayers as transparent composite electrode on flexible substrate with high figure of merit [J].

Dhar, Aritra ;

Alford, T. L. .

JOURNAL OF APPLIED PHYSICS, 2012, 112 (10)

[8]

Driscoll W.G., 1978, HDB OPTICS

[9] Optical studies on ZnO films prepared by sol-gel method [J].

Ghosh, T. ;

Bandopadhyay, S. ;

Roy, K. K. ;

Maiti, A. K. ;

Goswami, K. .

CRYSTAL RESEARCH AND TECHNOLOGY, 2009, 44 (08) :879-882

[10] Investigation on the effect of Zr doping in ZnO thin films by spray pyrolysis [J].

Gokulakrishnan, V. ;

Parthiban, S. ;

Jeganathan, K. ;

Ramamurthi, K. .

APPLIED SURFACE SCIENCE, 2011, 257 (21) :9068-9072

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