Comment on "Structural and Electrical Properties of Atomic Layer Deposited Al-Doped ZnO Films"

被引:4
|
作者
Saha, Debabrata [1 ,2 ]
Misra, Pankaj [1 ]
Joshi, Mukesh [1 ]
Kukreja, Lalit Mohan [1 ]
机构
[1] Raja Ramanna Ctr Adv Technol, Laser Mat Proc Div, Indore 452013, Madhya Pradesh, India
[2] Indian Inst Technol, Dept Energy Sci & Engn, Bombay 400076, Maharashtra, India
关键词
atomic layer deposition; doping; electrical properties; thin films; ZnO;
D O I
10.1002/adfm.201702875
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
In a recent report, Lee et al. have proposed an "effective field model" for extrinsic doping to explain the electrical properties of Al-doped zinc oxide (ZnO) films grown by atomic layer deposition (ALD)([1]). They have introduced the doping model by considering the layered structure of the ALD-grown films as observed in the transmission electron microscopy measurements. However, in the present comment, we have demonstrated that the suggested doping model is misleading in which physically inconsistent assumptions are considered throughout. Herein, a reasonable interpretation of the electrical properties and doping mechanism of the ALD-grown films by taking into consideration the theoretical formulations of the disordered electronic system is suggested.
引用
收藏
页数:4
相关论文
共 50 条
  • [31] Effect of Substrate Temperature on the Electrical Properties of Al-doped Zinc Oxide Films Deposited on Polyethylene Terephthalate
    Faraj, Mohammad G.
    ARO-THE SCIENTIFIC JOURNAL OF KOYA UNIVERSITY, 2022, 10 (02): : 131 - 133
  • [32] Synthesis and characterization of Al-doped ZnO and Al/F co-doped ZnO thin films prepared by atomic layer deposition
    Starowicz, Zbigniew
    Zi, Adam
    Ostapko, Jakub
    Wlazlo, Mateusz
    Kolodziej, Grzegorz
    Szczerba, Maciej Jakub
    Putynkowski, Grzegorz
    Socha, Robert Piotr
    MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2023, 292
  • [33] Structural, optical and photocatalysis properties of sol-gel deposited Al-doped ZnO thin films
    Islam, Muhammad R.
    Rahman, Mukhlasur
    Farhad, S. F. U.
    Podder, J.
    SURFACES AND INTERFACES, 2019, 16 : 120 - 126
  • [34] Correlation of structural, electrical and optical properties of Al-doped ZnO TCOs
    Singh, Rajan
    Mukherjee, S. K.
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2022, 33 (09) : 6969 - 6980
  • [35] In situ Al-doped ZnO films by atomic layer deposition with an interrupted flow
    Huang, Jheng-Ming
    Ku, Ching-Shun
    Lin, Chih-Ming
    Chen, San-Yuan
    Lee, Hsin-Yi
    MATERIALS CHEMISTRY AND PHYSICS, 2015, 165 : 245 - 252
  • [36] Effect of precursor-pulse on properties of Al-doped ZnO films grown by atomic layer deposition
    Kwon, SJ
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (02): : 1062 - 1066
  • [37] Preparation and optical-electrical properties of Al-doped ZnO films
    Fu, Qiuyue
    Hao, Sue
    Shen, Bin
    Duan, Xiangbin
    Na, Haichen
    RESEARCH ON CHEMICAL INTERMEDIATES, 2013, 39 (02) : 527 - 536
  • [38] Effect of Al doping on structural and optical properties of atomic layer deposited ZnO thin films
    Alev, Onur
    Ozdemir, Okan
    Kilic, Alp
    Akcan, Dogan
    Buyukkose, Serkan
    SURFACES AND INTERFACES, 2024, 52
  • [39] Effect of a hydrogen ratio in electrical and optical properties of hydrogenated Al-doped ZnO films
    Tark, S. J.
    Ok, Y. -W.
    Kang, M. G.
    Lim, H. J.
    Kim, W. M.
    Kim, D.
    JOURNAL OF ELECTROCERAMICS, 2009, 23 (2-4) : 548 - 553
  • [40] Atomic layer deposition of Al-doped ZnO nanomembrane with in situ monitoring
    Wang, Jinlong
    Gu, Zilong
    Zhao, Zhe
    Mei, Yu
    Ke, Xinyi
    Chen, Yihao
    Huang, Gaoshan
    Mei, Yongfeng
    NANOTECHNOLOGY, 2024, 35 (40)