Comment on "Structural and Electrical Properties of Atomic Layer Deposited Al-Doped ZnO Films"

被引:4
|
作者
Saha, Debabrata [1 ,2 ]
Misra, Pankaj [1 ]
Joshi, Mukesh [1 ]
Kukreja, Lalit Mohan [1 ]
机构
[1] Raja Ramanna Ctr Adv Technol, Laser Mat Proc Div, Indore 452013, Madhya Pradesh, India
[2] Indian Inst Technol, Dept Energy Sci & Engn, Bombay 400076, Maharashtra, India
关键词
atomic layer deposition; doping; electrical properties; thin films; ZnO;
D O I
10.1002/adfm.201702875
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
In a recent report, Lee et al. have proposed an "effective field model" for extrinsic doping to explain the electrical properties of Al-doped zinc oxide (ZnO) films grown by atomic layer deposition (ALD)([1]). They have introduced the doping model by considering the layered structure of the ALD-grown films as observed in the transmission electron microscopy measurements. However, in the present comment, we have demonstrated that the suggested doping model is misleading in which physically inconsistent assumptions are considered throughout. Herein, a reasonable interpretation of the electrical properties and doping mechanism of the ALD-grown films by taking into consideration the theoretical formulations of the disordered electronic system is suggested.
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页数:4
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