Comment on "Structural and Electrical Properties of Atomic Layer Deposited Al-Doped ZnO Films"

被引:4
|
作者
Saha, Debabrata [1 ,2 ]
Misra, Pankaj [1 ]
Joshi, Mukesh [1 ]
Kukreja, Lalit Mohan [1 ]
机构
[1] Raja Ramanna Ctr Adv Technol, Laser Mat Proc Div, Indore 452013, Madhya Pradesh, India
[2] Indian Inst Technol, Dept Energy Sci & Engn, Bombay 400076, Maharashtra, India
关键词
atomic layer deposition; doping; electrical properties; thin films; ZnO;
D O I
10.1002/adfm.201702875
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
In a recent report, Lee et al. have proposed an "effective field model" for extrinsic doping to explain the electrical properties of Al-doped zinc oxide (ZnO) films grown by atomic layer deposition (ALD)([1]). They have introduced the doping model by considering the layered structure of the ALD-grown films as observed in the transmission electron microscopy measurements. However, in the present comment, we have demonstrated that the suggested doping model is misleading in which physically inconsistent assumptions are considered throughout. Herein, a reasonable interpretation of the electrical properties and doping mechanism of the ALD-grown films by taking into consideration the theoretical formulations of the disordered electronic system is suggested.
引用
收藏
页数:4
相关论文
共 50 条
  • [21] Effects of Rapid Thermal Annealing on Structural, Luminescent, and Electrical Properties of Al-Doped ZnO Films Grown by Atomic Layer Deposition
    Geng, Yang
    Xie, Zhang-Yi
    Xu, Sai-Sheng
    Sun, Qing-Qing
    Ding, Shi-Jin
    Lu, Hong-Liang
    Zhang, David Wei
    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2012, 1 (03) : N45 - N48
  • [22] Atomic layer deposition of Al-doped ZnO thin films
    Tynell, Tommi
    Yamauchi, Hisao
    Karppinen, Maarit
    Okazaki, Ryuji
    Terasaki, Ichiro
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2013, 31 (01):
  • [23] Structural, optical, and electrical properties of Hf-doped ZnO films deposited by atomic layer deposition
    Geng, Yang
    Xie, Zhang-Yi
    Yang, Wen
    Xu, Sai-Sheng
    Sun, Qing-Qing
    Ding, Shi-Jin
    Lu, Hong-Liang
    Zhang, David Wei
    SURFACE & COATINGS TECHNOLOGY, 2013, 232 : 41 - 45
  • [24] Thermophysical and electrical properties of Al-doped ZnO films
    Oka, Nobuto
    Kimura, Kentaro
    Yagi, Takashi
    Taketoshi, Naoyuki
    Baba, Tetsuya
    Shigesato, Yuzo
    JOURNAL OF APPLIED PHYSICS, 2012, 111 (09)
  • [25] Electrical transport properties of Al-doped ZnO films
    Liu, Xin Dian
    Liu, Jing
    Chen, Si
    Li, Zhi Qing
    APPLIED SURFACE SCIENCE, 2012, 263 : 486 - 490
  • [26] The effect of SiO2 buffer layer on the electrical and structural properties of Al-doped ZnO films deposited on soda lime glasses
    Ri, K. H.
    Wang, Y. B.
    Zhou, W. L.
    Gao, J. X.
    Wang, X. J.
    Yu, J.
    APPLIED SURFACE SCIENCE, 2011, 257 (13) : 5471 - 5475
  • [27] Al-doped ZnO: Electronic, electrical and structural properties
    Maldonado, Frank
    Stashans, Arvids
    JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2010, 71 (05) : 784 - 787
  • [28] Influence of thickness on the structural, electrical and optical properties of Al-doped ZnO films deposited by RF magnetron sputtering
    Chen, Jian
    Sun, Yihua
    Sun, Xiaohua
    Huang, Caihua
    ADVANCES IN TEXTILE ENGINEERING AND MATERIALS III, PTS 1 AND 2, 2013, 821-822 : 845 - 848
  • [29] Analysis Structural Modification and Optical–Electrical Properties of Al-Doped ZnO Oxide Films Deposited by Magnetron Sputtering
    E. J. C. Santos
    J. C. A. Queiroz
    M. G. O. Queiroz
    M. S. Liborio
    E. O. Almeida
    K. L. Bessa
    R. R. M. Souza
    M. C. Feitor
    T. H. C. Costa
    Brazilian Journal of Physics, 2021, 51 : 1677 - 1688
  • [30] Growth morphology and electrical/optical properties of Al-doped ZnO thin films grown by atomic layer deposition
    Dhakal, Tara
    Vanhart, Daniel
    Christian, Rachel
    Nandur, Abhishek
    Sharma, Anju
    Westgate, Charles R.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2012, 30 (02):