共 50 条
- [1] Electrical and Optical Properties of Al-doped ZnO Films Deposited by Atomic Layer Deposition KOREAN JOURNAL OF MATERIALS RESEARCH, 2013, 23 (08): : 469 - 475
- [3] Atomic Layer Deposition Deposited Al-Doped ZnO Films for Transistor Application 2021 5TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE (EDTM), 2021,
- [5] Impact of the sequence of precursor introduction on the growth and properties of atomic layer deposited Al-doped ZnO films JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2018, 36 (04):