The missing nano-architecture found in the barrier layer of porous anodic alumina

被引:16
|
作者
Liao, Jinfu [1 ]
Ling, Zhiyuan [1 ]
Li, Yi [1 ]
Hu, Xing [1 ]
机构
[1] S China Univ Technol, Dept Elect Mat Sci & Engn, Guangzhou 510640, Guangdong, Peoples R China
关键词
Nano-architecture; Chemical etching; Ion milling; Barrier layer; Porous anodic alumina; NANOPOROUS ALUMINA; OXIDE; ARRAYS; TEMPLATE; ANODIZATION; FABRICATION; MEMBRANES; NANOSTRUCTURES; MORPHOLOGY; GROWTH;
D O I
10.1016/j.elecom.2015.06.002
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Hexagrams were revealed on the barrier layer of porous anodic alumina during chemical etching and ion milling, indicating non-uniform etching. Six-membered ring structure holes appear firstly around the center of each cell and subsequently merge into a primary circular opening. A new pore-opening mechanism is proposed, and the possible origin of the non-uniform etching rate is also discussed. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码:37 / 40
页数:4
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