A More Effective Technique of Design Synthesis For MEMS with Expected Performance

被引：0

作者：

Chen, Shuxun ^{[1
]}

机构：

[1] Guangxi Univ, Dept Mech Engn, Nanning 530004, Guangxi, Peoples R China

来源：

FRONTIERS OF MANUFACTURING AND DESIGN SCIENCE II, PTS 1-6 | 2012年 / 121-126卷

关键词：

MEMS; Design Synthesis; Direct Solution Algorithm; Genetic Algorithms; Simulated; Annealing; comparing; ALGORITHMS;

D O I：

10.4028/www.scientific.net/AMM.121-126.637

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A design synthesis technique based on sensitivity for Micro-Electro-Mechanical Systems (MEMS) proposed. This new technique can be called Sensitivity-Based Direct Solution Algorithm (DSA) of design synthesis for MEMS with expected performance. Design synthesis with expected performance is regarded as a reverse problem of MEMS analysis. Behavior equation group can be educed from analysis equations. This behavior equation group can be solved using any solution algorithm of non-linear equation group. Newton Iteration Method based on sensitivity is adopted. Comparing with Genetic Optimization Algorithm (GA), computational workload of DSA is greatly decreased.

引用

页码：637 / 641

页数：5

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