Direct and accurate patterning of plasmonic nanostructures with ultrasmall gaps

被引:41
作者
Si, Guangyuan [1 ]
Zhao, Yanhui [2 ]
Lv, Jiangtao [1 ]
Wang, Fengwen [1 ]
Liu, Hailong [3 ]
Teng, Jinghua [4 ]
Liu, Yan Jun [4 ]
机构
[1] Northeastern Univ, Coll Informat Sci & Engn, Shenyang 110004, Peoples R China
[2] Penn State Univ, Dept Engn Sci & Mech, University Pk, PA 16802 USA
[3] Yanshan Univ, Inst Elect Engn, Measurement Technol & Instrumentat Key Lab Hebei, Qinhuangdao 066004, Hebei, Peoples R China
[4] ASTAR, Inst Mat Res & Engn, Singapore 117602, Singapore
基金
中国国家自然科学基金;
关键词
DIFFRACTION GRATINGS; OPTICAL-PROPERTIES; SURFACE-PLASMONS; FANO RESONANCES; COLOR FILTERS; NANOPARTICLES; LIGHT; METAMATERIALS; TRANSMISSION; SUPERLENS;
D O I
10.1039/c3nr00655g
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We report an improved method to directly and accurately fabricate plasmonic nanostructures with ultrasmall gaps. The fabrication is based on high-resolution focused ion beam milling with closely packed nanoring patterns. With fine and precise adjustment of the ion beam, elegant plasmonic nanostructures with ultrasmall dimensions down to 10 nm are achieved. We also show that the gap dimensions have a strong effect on the optical reflectance and transmittance of the plasmonic nanostructures. Measured results show reasonable agreement with finite-difference time-domain calculations. Our approach could find promising applications in plasmon-assisted sensing and surface-enhanced spectroscopy.
引用
收藏
页码:4309 / 4313
页数:5
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