Synthesis of Silicon Nanowire Arrays by Metal-Assisted Chemical Etching in Aqueous NH4HF2 Solution

被引：4

作者：

Naama, S. ^{[1
]}

Hadjersi, T. ^{[1
]}

Nezzal, G. ^{[2
]}

Guerbous, L. ^{[3
]}

机构：

[1] UDTS, Algiers, Algeria

[2] USTHB, LPT, FGMGP, Dept Genie Proc, Bab Ezzouar 16111, Alger, Algeria

[3] CRNA, Algiers, Algeria

来源：

JOURNAL OF NANO RESEARCH | 2013年 / 21卷

关键词：

Nanostructure; silicon nanowires; chemical etching; scanning electron microscopy (SEM); photoluminescence (PL); OXIDIZED POROUS SILICON; LASER-ABLATION; PHOTOLUMINESCENCE; SI; FABRICATION; EMISSION; UNIFORM;

D O I：

10.4028/www.scientific.net/JNanoR.21.109

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

One-step metal-assisted electroless chemical etching of p-type silicon substrate in NH4HF2/AgNO3 solution was investigated. The effect of different etching parameters including etching time, temperature, AgNO3 concentration and NH4HF2 concentration were investigated. The etched layers formed were investigated by scanning electron microscopy (SEM) and Photoluminescence. It was found that the etched layer was formed by well-aligned silicon nanowires. It is noted that their density and length strongly depend on etching parameters. Room temperature photoluminescence (PL) from etched layer was observed. It was observed that PL peak intensity increases significantly with AgNO3 concentration.

引用

页码：109 / 115

页数：7

共 50 条

[21] Chemical Excitation of Silicon Photoconductors by Metal-Assisted Chemical Etching
Li, Shengyang
Ayedh, Hussein M.
Yli-Koski, Marko
Vahanissi, Ville
Savin, Hele
Oksanen, Jani
JOURNAL OF PHYSICAL CHEMISTRY C, 2023, 127 (08) : 4072 - 4078
[22] Bubble-Regulated Silicon Nanowire Synthesis on Micro-Structured Surfaces by Metal-Assisted Chemical Etching
Li, Yinxiao
Duan, Chuanhua
LANGMUIR, 2015, 31 (44) : 12291 - 12299
[23] Electrochemical Impedance Study of Porous Silicon Prepared by Metal-Assisted Chemical Etching
Mogoda, A. S.
Ahmad, Y. H.
SILICON, 2019, 11 (06) : 2837 - 2844
[24] Morphology of Nanowire Arrays Produced by Metal-Assisted Chemical Etching on Si Wafers of Different Types: Comparative Analysis
Nichkalo, Stepan
Druzhinin, Anatoly
Chekaylo, Mykola
2019 IEEE 39TH INTERNATIONAL CONFERENCE ON ELECTRONICS AND NANOTECHNOLOGY (ELNANO), 2019, : 265 - 268
[25] Metal-assisted chemical etching of silicon and nanotechnology applications
Han, Hee
Huang, Zhipeng
Lee, Woo
NANO TODAY, 2014, 9 (03) : 271 - 304
[26] Vapor Phase Metal-Assisted Chemical Etching of Silicon
Hildreth, Owen J.
Schmidt, Daniel R.
ADVANCED FUNCTIONAL MATERIALS, 2014, 24 (24) : 3827 - 3833
[27] Design and fabrication of wafer-scale highly uniform silicon nanowire arrays by metal-assisted chemical etching for antireflection films
Yao, Chuhao
Zhao, Yue
Zhang, Xiaomeng
Li, Hailiang
Xie, Changqing
RESULTS IN PHYSICS, 2021, 31
[28] Vertical-Aligned Silicon Nanowire Arrays with Strong Photoluminescence Fabricated by Metal-Assisted Electrochemical Etching
Dao Tran Cao
Cao Tuan Anh
Luong Truc Quynh Ngan
JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, 2020, 15 (01) : 127 - 135
[29] Silicon nanowires obtained by metal-assisted chemical etching for photonic applications
Leonardi, Antonio Alessio
Lo Faro, Maria Jose
Sciuto, Emanuele
Conoci, Sabrina
Fazio, Barbara
Irrera, Alessia
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 2022, 177 (11-12): : 1195 - 1208
[30] Reduced porosity in metal-assisted chemical etching of vertical Si nanowire arrays by an induced magnetic field
Yun, Seokhun
Choi, Chan Ho
Patil, Dipali S.
Kim, Doo Gun
Lee, Taikjin
Song, Gwang Yeom
Heo, Jaeyeong
Shin, Jae Cheol
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2016, 213 (06): : 1572 - 1576

← 1 2 3 4 5 →