Nonlinear Optical Diagnostics of Thin Polycrystalline Lead Zirconate Titanate Films

被引:5
作者
Elshin, A. S. [1 ]
Pronin, I. P. [2 ]
Senkevich, S. V. [2 ]
Mishina, E. D. [1 ]
机构
[1] MIREA Russian Technol Univ, Moscow 119454, Russia
[2] Russian Acad Sci, Ioffe Inst, St Petersburg 194021, Russia
关键词
ferroelectric thin films; lead zirconate titanate; spherulitic structure; nonlinear optical diagnostics; second-harmonic generation; CRYSTALLIZATION;
D O I
10.1134/S1063785020040215
中图分类号
O59 [应用物理学];
学科分类号
摘要
Nonlinear optical microscopy techniques have been used to study thin films of single-phase (perovskite) and two-phase (perovskite-pyrochlore) lead zirconate titanate (PZT) deposited on Pt/TiO2/SiO2/Si by means of radio-frequency magnetron sputtering at various target-substrate distances (D = 30-70 mm). Results revealed inhomogeneous distribution of second-harmonic generation in spherulitic perovskite islands, including increased signal intensity at perovskite/pyrochlore interface, which may be related to a nonuniform distribution of mechanical stresses. Factors responsible for the observed strong variation in second-harmonic signal are discussed, including the mutual relationship between changes in the character of spherulitic structure and conditions of PZT film deposition depending on the target-substrate distance.
引用
收藏
页码:385 / 388
页数:4
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