Parametric Nonlinear Lumped Element Model for Circular CMUTs in Collapsed Mode

被引：17
作者：
Aydogdu, Elif [1 ]
Ozgurluk, Alper [2 ]
Atalar, Abdullah [1 ]
Koymen, Hayrettin [1 ]
机构：
[1] Bilkent Univ, Dept Elect & Elect Engn, TR-06533 Ankara, Turkey
[2] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
来源：
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2014年 / 61卷 / 01期
关键词：
ULTRASONIC TRANSDUCERS; RADIATION IMPEDANCE;
D O I：
10.1109/TUFFC.2014.6689785
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
We present a parametric equivalent circuit model for a circular CMUT in collapsed mode. First, we calculate the collapsed membrane deflection, utilizing the exact electrical force distribution in the analytical formulation of membrane deflection. Then we develop a lumped element model of collapsed membrane operation. The radiation impedance for collapsed mode is also included in the model. The model is merged with the uncollapsed mode model to obtain a simulation tool that handles all CMUT behavior, in transmit or receive. Large-and small-signal operation of a single CMUT can be fully simulated for any excitation regime. The results are in good agreement with FEM simulations.
引用
收藏
页码：173 / 181
页数：9
相关论文
共 26 条
[1]  
Bayram B, 2005, ULTRASON, P601
[2]   Dynamic analysis of capacitive micromachined ultrasonic transducers [J].
Bayram, B ;
Yaralioglu, GG ;
Kupnik, M ;
Ergun, AS ;
Oralkan, Ö ;
Nikoozadeh, A ;
Khuri-Yakub, BT .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2005, 52 (12) :2270-2275
[3]   A new regime for operating capacitive micromachined ultrasonic transducers [J].
Bayram, B ;
Haeggström, E ;
Yaralioglu, GG ;
Khuri-Yakub, BT .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2003, 50 (09) :1184-1190
[4]   Electro-acoustical characterization procedure for cMUTs [J].
Buigas, M ;
de Espinosa, FM ;
Schmitz, G ;
Ameijeiras, I ;
Masegosa, P ;
Domínguez, M .
ULTRASONICS, 2005, 43 (05) :383-390
[5]   PSpice modeling of capacitive microfabricated ultrasonic transducers [J].
Caliano, G ;
Caronti, A ;
Baruzzi, M ;
Rubini, A ;
Iula, A ;
Carotenuto, R ;
Pappalardo, M .
ULTRASONICS, 2002, 40 (1-8) :449-455
[6]   Acoustic coupling in capacitive microfabricated ultrasonic transducers: Modeling and experiments [J].
Caronti, A ;
Savoia, A ;
Caliano, G ;
Pappalardo, M .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2005, 52 (12) :2220-2234
[7]   Electromechanical coupling factor of capacitive micromachined ultrasonic transducers [J].
Caronti, A ;
Carotenuto, R ;
Pappalardo, M .
JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 2003, 113 (01) :279-288
[8]   An accurate model for capacitive micromachined ultrasonic transducers [J].
Caronti, A ;
Caliano, G ;
Iula, A ;
Pappalardo, M .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2002, 49 (02) :159-168
[9]   A finite difference model for cMUT devices [J].
Certon, D ;
Teston, F ;
Patat, F .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2005, 52 (12) :2199-2210
[10]   Characterization of one-dimensional capacitive micromachined ultrasonic immersion transducer arrays [J].
Jin, XC ;
Oralkan, Ö ;
Degertekin, FL ;
Khuri-Yakub, BT .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2001, 48 (03) :750-760
123