Simulation Model of Transmitted X-Rays in Polycapillary Optics for TES Microcalorimeter EDS System on Scanning Transmission Electron Microscope

被引：9

作者：

Takano, Akira ^{[1
]}

Maehata, Keisuke ^{[1
]}

Iyomoto, Naoko ^{[1
]}

Hara, Toru ^{[2
]}

Mitsuda, Kazuhisa ^{[3
]}

Yamasaki, Noriko ^{[3
]}

Tanaka, Keiichi ^{[4
]}

机构：

[1] Kyushu Univ, Dept Appl Quantum Phys & Nucl Engn, Fukuoka 8190395, Japan

[2] Natl Inst Mat Sci, Tsukuba, Ibaraki 3050044, Japan

[3] Japan Aerosp Explorat Agcy, Inst Space & Astronaut Sci, Sagamihara, Kanagawa 2298510, Japan

[4] Hitachi High Tech Sci Corp, Shizuoka 4101393, Japan

来源：

IEEE TRANSACTIONS ON NUCLEAR SCIENCE | 2018年 / 65卷 / 02期

基金：

日本科学技术振兴机构;

关键词：

Polycapillary optics; simulation; transition-edge sensor (TES) microcalorimeter; X-ray; SPECTROMETER; RESOLUTION; LENSES;

D O I：

10.1109/TNS.2017.2786703

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We created a simple simulation model of transmitted X-rays in polycapillary optics for improved understanding of the transmission characteristics and to aid in the design of the geometrical parameters of the polycapillary optics. New polycapillary optics for a 64-pixel array transition-edge sensor (TES) microcalorimeter energy-dispersive spectrometer system that was installed in a scanning transmission electron microscope (STEM) were developed using the simulation model. The characteristic X-rays that are emitted from the STEM specimen were transmitted and focused on the pixel array TES microcalorimeter by the polycapillary optics. The experimental X-ray transmission characteristics of the manufactured polycapillary optics agreed with the simulated results.

引用

页码：758 / 765

页数：8

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