Micro-fabricated membrane gas valves with a non-stiction coating deposited by C4F8/Ar plasma

Micro-fabricated gas valves with C4F8/Ar treatment at the sealing interface are designed, fabricated and characterized to passively control gases in a micro gas analysis system. The check valves form a seal between a polished Si/SiO2 substrate and a smooth polyimide (PI) membrane. The smooth PI membrane touches the SiO2 surface, giving rise to relatively strong van der Waals adhesion, and under humid conditions hydrogen-bonded stiction can occur at the interface between PI and SiO2. To prevent stiction from dominating adhesion, the valve-seat surface was treated with a hydrophobic CFn thin film, which was formed by exposing the surface to C4F8/Ar inductively coupled plasma (ICP) at low power. The valves without a non-stiction coating did not open with inlet pressures up to 210 kPa. With a non-stiction coating, the valves showed an average initial opening pressure of 59.25 kPa. In order to further reduce the opening pressure, 40% of the valve-seat area is reduced. After modification, the average opening pressure is reduced to 32.5 kPa. After the initial opening, the average in-use opening pressure was 16.9 kPa before area modification, and 13.1 kPa after the modification. The valve has been tested up to 10 000 open/close cycles under dry N-2 gas flow, and an additional 3000 open/close cycles under humid N-2 gas flow. The average forward flow conductance of the valves before modification was 1.1 sccm kPa(-1), and the conductance after modification was 1.41 sccm kPa(-1). The measured leakage is between 0.0003 and 0.004 sccm up to 35 kPa reverse pressure.