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- [1] Characterization of Beam Splitter using Mueller Matrix Ellipsometry TENTH INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING MEASUREMENTS AND INSTRUMENTATION, 2019, 11053
- [3] Photomask CD and LER characterization using Mueller Matrix Spectroscopic Ellipsometry 30TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE, 2014, 9231
- [4] Accurate characterization of nanoimprinted resist patterns using Mueller matrix ellipsometry OPTICS EXPRESS, 2014, 22 (12): : 15165 - 15177
- [6] Characterization of curved surface layer by Mueller matrix ellipsometry JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2016, 34 (02):
- [7] Critical dimension of biperiodic gratings determined by spectral ellipsometry and Mueller matrix polarimetry EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2008, 42 (03): : 351 - 359
- [9] Optimization of instrument matrix for Mueller matrix ellipsometry based on partial elements analysis of the Mueller matrix OPTICS EXPRESS, 2017, 25 (16): : 18872 - 18884
- [10] Mueller Matrix Model in Ellipsometry Measurement of Quartz Crystal CHINESE JOURNAL OF LASERS-ZHONGGUO JIGUANG, 2023, 50 (14):